Reagent dispensing apparatus and delivery method

A technology for dispensing devices and reagents, applied in dispensing devices, special dispensing devices, liquid dispensing, conveying or transferring devices, etc., to solve problems such as wafer damage

Inactive Publication Date: 2009-11-04
PRAXAIR TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the ampoule were to run dry in the middle of a cycle, the entire batch of wafers would be damaged resulting in a potential loss of millions of dollars

Method used

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  • Reagent dispensing apparatus and delivery method
  • Reagent dispensing apparatus and delivery method
  • Reagent dispensing apparatus and delivery method

Examples

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Embodiment Construction

[0162] The invention reduces the number of container designs required to support different applications. Standard dual-port vessels without conduits can be converted by inserting a gasket / conduit connector between one of these ports and the corresponding valve to allow for conduits (i.e., bubbler tubes for gas delivery or Containers used in applications such as dip tubes for liquid transfer (see figure 1 ). The overall height of the container does not change. Unlike the prior art, the conduit is not welded to the top of the vessel so it can be removed should modifications and / or replacement become necessary. This allows for increased flexibility.

[0163] The practice of the present invention does not increase the length required to attach a conduit to a vessel using a face seal port (ie, a gasket has been used to seal the connection). Attaching conduits to ports using face seal fittings can be accomplished by using connectors with compression fittings. The catheter is in...

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Abstract

The present invention relates to a reagent dispensing apparatus and a delivery method, particularly a vapor or liquid phase reagent dispensing apparatus that may he used for dispensing vapor or liquidphase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. This invention reduces the number of container designs required to support different applications. A standard two port container without a tube can be converted to a container capable of being used in applications which require a tube (i.e., bubbler tube for gas delivery or a dip tube for liquid delivery), by inserting a gasket / tube adapter between one of the ports and the corresponding valve in accordance with this invention.

Description

technical field [0001] The present invention relates to a gas or liquid phase reagent dispensing device usable for dispensing gas or liquid phase reagents, such as precursors for the deposition of materials in the manufacture of semiconductor materials and devices. Background technique [0002] High-purity chemicals used in the semiconductor and pharmaceutical industries require specialized packaging to maintain their purity in storage. This is especially true for chemicals that react with air and / or water vapor in the air. Typically, these high purity chemicals are provided in containers such as bubblers or ampoules. [0003] Modern chemical vapor deposition and atomic layer deposition tools utilize bubblers or ampoules to deliver precursor chemicals into the deposition chamber. These bubblers or ampoules work by passing a carrier gas through a container containing a high-purity liquid precursor chemical and transporting the precursor vapor along with the carrier gas into...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J4/00B01L5/00C23C16/448B67D7/02B67D7/32
CPCB01J4/001C23C16/4481C23C16/4482F16L19/0218Y10T137/0324
Inventor J·D·佩克
Owner PRAXAIR TECH INC
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