Methods and apparatus for idle time reduction in a production facility

A technology of production line and equipment, applied in the field of manufacturing automation system for moving materials

Inactive Publication Date: 2009-12-02
CHARTERED SEMICONDUCTOR MANUFACTURING
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

While it is possible to perform some process steps on a single process tool, it is often the case that substrates have to be transferred between different process tools at different locations on the production line

Method used

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  • Methods and apparatus for idle time reduction in a production facility
  • Methods and apparatus for idle time reduction in a production facility
  • Methods and apparatus for idle time reduction in a production facility

Examples

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Embodiment Construction

[0021] In general, the present invention relates to manufacturing automation systems and methods for moving material on a production line. The item can be one or more WIP items that make up a single lot.

[0022] figure 2 A manufacturing automation system 200 is shown that may be used to control the operation of a production line. Such as figure 2 As shown, the manufacturing automation system 200 includes at least one machine supervisory program (MSP) 210 that monitors the status of process equipment associated therewith and acts as a communication interface with processing equipment associated therewith. The MSP is in duplex communication with Manufacturing Execution System (MES) 220 . The Manufacturing Execution System (MES) 220 tracks all execution or operations on the production line. The MES can also perform line-related functions such as tracking carrier locations and equipment status, performing lot booking and putting lots on hold.

[0023] In addition to MSP 21...

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PUM

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Abstract

Efficient manufacturing automation system and methods are described. The automation system controls movement of materials for processing by tools in a manufacturing facility. The system and methods include pre-emptive dispatching for transferring of materials. With the pre-emptive dispatching, the next destination and next lot to be processed is determined prior to a first lot being converted to a ready to unload state. This reduces wait time or idle time to improve tool utilization.

Description

technical field [0001] The present invention relates generally to manufacturing automation systems and methods for moving material on a production line. Background technique [0002] The manufacture of a product typically includes many sequentially performed process steps. In most cases, these process steps are carried out in more than one process tool, each tool having one or more process chambers. For example, the fabrication of electronic devices on a wafer processing line involves performing process steps such as thin film deposition, photolithography, etching, heat treatment, and dopant introduction relative to a wafer substrate such as silicon. While it is possible to perform some process steps on a single process tool, it is often the case that substrates have to be transferred between different process tools at different locations on the production line. [0003] figure 1 A known processing line layout 100 is shown. The processing line layout has a number of bays...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCY02P90/02
Inventor 坦加攀·吉纳穆蒂穆赫德阿齐兹·戚瓮田田林坚伟斯蒂芬托德·马克尔
Owner CHARTERED SEMICONDUCTOR MANUFACTURING
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