Tool setter of sharpening grinding wheel of semiconductor wafer
A tool setting device, semiconductor technology, applied in the direction of grinding device, semiconductor/solid device manufacturing, grinding/polishing equipment, etc., can solve the problems of slow feed speed, long stroke of the grinding wheel spindle, and low efficiency of semiconductor wafer grinding , to achieve the effect of shortening the idle stroke and improving the grinding efficiency
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[0008] See figure 1 , the present invention comprises a grinding wheel spindle 1, a grinding wheel spindle feed device 2, a grinding wheel 3, and a suction cup 4, the grinding wheel 3 is set on the grinding wheel spindle 1, the suction cup 4 is located below the grinding wheel 3, and the space between the lower surface of the grinding wheel 3 and the upper surface of the suction cup 4 is installed There is a micro switch 5 with a height H, the bottom end of the micro switch 5 is equipped with a switch contact 6, the micro switch 5 is connected to the top of the rotating shaft 8 through the spring 7 mounted on the side, and the bottom of the rotating shaft 8 is connected to the swing cylinder 9, 10 among the figure is the fixed structure of sucker.
[0009] Its working principle is as follows: the swing cylinder 9 moves to make the top of the micro switch 5 contact the lower surface of the grinding wheel 3, the rotation of the grinding wheel spindle 1 drives the grinding wheel ...
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