Exact position regulating device and semiconductor online detection system including same

Abstract

The invention discloses an exact position regulating device, comprising a mounting seat, a workbench, a transmission mechanism and a driving mechanism; wherein the transmission mechanism comprises a transmission shaft, a transmission belt, a driving wheel and a mounting plate fixed with a plurality of transmission wheels, one end of the transmission shaft is fixedly connected with the workbench, the other end fixedly penetrates the mounting plate and is in pivot joint with the mounting seat, a plurality of transmission wheels are symmetrically distributed by taking the transmission shaft as the center, the driving wheel and the transmission wheel are arranged on the same plane, and the turning radius of the workbench is more than that of the driving wheel. The exact position regulating device has simple assembly and convenient maintenance and replacement, the driving wheel is utilized to drive the mounting plate fixed with transmission wheels at side angle to rotate, so as to drive theworkbench to rotate, the workbench has extremely low angular speed relative to the driving wheel while the driving wheel and the workbench have the same linear speed, so that the workbench can run steadily and accurately in small angle. The invention also discloses a semiconductor online detection system including the device.

Description

Technical field [0001] The invention relates to a precise position adjustment device in a semiconductor process, in particular to a precise position adjustment device in a vacuum chamber of a thin film semiconductor production line and a semiconductor online detection system with the device. Background technique [0002] In recent years, the thin-film semiconductor market has developed vigorously, which has gradually deepened the application field of thin-film semiconductors, and its trend is expanding toward large areas. For example, thin-film solar cell devices using glass substrates have developed to a size of 1100mm×1400mm as the general size, and organic light-emitting display devices OLED) panels have also expanded from traditional mobile phone screens to large-area TVs and portable computer displays, and their size has reached more than 370mm×470mm. Such thin-film semiconductor products need to go through many different coating processes or their integration, such as Chemi...

AI Technical Summary

Problems solved by technology

However, with the gradual expansion of the size of semiconductors and the promotion of integrated system integration of various processes, it is often impossible to detect the quality of the coating film or the defects of each link in a timely manner. The subsequent coating process is useless, which will waste a lot of raw materials and energy, and is not conducive to troubleshooting

Many thin-film semiconductor processes need to be carried out in a vacuum environment, such as the coating process. The existing substrate carrying inspection platform is complex in design and difficult to manufacture. It uses a separate large sprocket or large pulley to cooperate with the workbench, and the processing and assembly are relatively complicated. It is inconvenient to repair and replace, and it is not easy to adjust the small angle

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