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Multi-source parallel confocal micro detection system

A detection system, confocal microscopy technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as limiting the scope of application, achieve the effect of expanding the scope of application, high-precision measurement, and overcoming the Taber effect

Inactive Publication Date: 2010-03-10
HEFEI UNIV OF TECH
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Problems solved by technology

[0003] The purpose of the present invention is to provide a multi-light source parallel confocal microscopic detection system, using lasers of three different wavelengths to construct the synthetic light source system of the parallel confocal detection system, to solve the problem that the traditional confocal microscope has limited application range due to the Taber effect The problem

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Embodiment Construction

[0014] Multi-light source parallel confocal microscopic detection system, including three lasers 1, the wavelengths of the three lasers 1 are 650nm, 473nm and 405nm respectively, after the three lasers 1 are placed in parallel, a beam combiner 2 is installed at the light outlets of the three lasers 1 , the light emitted by the three lasers 1 enters the beam combiner 2, is combined by the beam combiner 2, and then exits from the light outlet of the beam combiner 2, and a collimating lens 3 is arranged in front of the beam combiner 2 light outlet, and the beam combiner The light outlet of 2 is located at the focus of one side of the collimating lens 3, and the other side of the collimating lens 3 is provided with a microlens array 4, the microlens array 4 is a 42×42 microlens array, and the aperture size of the microlens array 4 satisfies The parallel light after collimating lens 3 expands can be filled with microlens array 4, and the optical path front of microlens array 4 is pr...

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Abstract

The invention relates to a multi-source parallel confocal micro detection system comprising a plurality of lasers, the light outlet of the lasers is provided with a beam combiner, a collimating lens is arranged in front of the light outlet of the beam combiner, the light outlet of the beam combiner is on the focal point on one side of the collimating lens, and the other side of the collimating lens is provided with a microlens array; a spectroscope, a first telephotolens and a second telephotolens are arranged in front of the light path of the microlens array, and one side of the reflecting surface of the spectroscope is provided with an area array CCD. The multi-source parallel confocal micro detection system also comprises a movable workbench on which a liner scale is fixed, and the liner scale is arranged on the light path of the second telephotolens; and a detected object surface is arranged on the workbench and moves along with the workbench. The invention adopts lasers with various wavelengths to build the synthesized light source of the parallel confocal detection system, overcomes the influence of the Talbot effect on the premise of ensuring laser parallel confocal system resolution and measuring speed and realizes large-range and high-precision measurement so as to extend the application range of the parallel confocal detection system.

Description

technical field [0001] The invention relates to the field of optical detection devices, the field of laser measurement and the field of micro-nano measurement. Background technique [0002] Compared with ordinary microscopes, laser confocal microscopes have higher resolution and tomographic imaging capabilities, and are widely used in scientific research fields such as biology, life sciences, micro-nano manufacturing, and materials. Compared with single-point confocal microscopic detection, the non-scanning parallel confocal microscopic detection technology based on micro-optical devices developed in recent years has further improved the detection speed and efficiency. The non-scanning parallel confocal microscopic detection can realize the division of the light beam through the micro-optical device (micro-lens array), thus changing from single-point measurement to multi-point simultaneous measurement. Due to the good coherence of the laser, after passing through the microl...

Claims

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Application Information

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IPC IPC(8): G01B11/00G01B11/24
Inventor 余晓芬余卿王永红刘文文
Owner HEFEI UNIV OF TECH
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