Device for coating a plurality of closest-packed substrates arranged on a susceptor

A technology for substrates and bases, applied in coatings, gaseous chemical plating, metal material coating processes, etc., can solve problems such as gas phase loss and negative impact on the uniformity of deposited layers
CN101681871AActive Publication Date: 2010-03-24AIXTRON AG
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
AIXTRON AG
Publication Date
2010-03-24

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Abstract

The invention relates to a device for coating a plurality of substrates (3) which are regularly arranged on a bearing surface (2) of a susceptor (1) associated to a process chamber (14), wherein the bearing surface (2) forms abutment flanks (5) for the edge mounting of each substrate (3). In order to reduce the free susceptor surface to a minimum, it is proposed that the abutment flanks of the lateral walls (5) are formed by bases (4) which project from the bearing surface (2) and are separated at a distance from one another. Said bases are arranged on the corner points (10) of a honeycomb structure and have an outline essentially corresponding to an equilateral triangle with inwardly curved sides (5).
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Description

technical field

[0001] The invention relates to a device for coating a plurality of substrates arranged in a regular manner on a support surface of a susceptor assigned to a process chamber, the support surface providing abutment flanks for edge bonding of each substrate . Background technique

[0002] DE US 5814196 describes a coating device in which the substrate is located in a groove, the edge of which matches the peripheral shape of the substrate. The bottom surface of the groove defines a support surface for the substrate. The center of the substrate is located at the corner point of the equilateral triangle.

[0003] A polishing device is known from US 2003 / 0109139 A1 in which every third substrate is arranged on a substrate carrier in a planetary arrangement.

[0004] DE 10 2004 009 130 A1 describes such a device for coating a plurality of substrates arranged in a regular manner on a support surface of a base assigned to a treatment chamber, which support surface ...

Claims

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