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Acoustic surface wave gas sensor and manufacturing method thereof

A gas sensor and surface acoustic wave technology, which is applied in the direction of using sonic/ultrasonic/infrasonic waves to analyze fluids, etc., can solve the problems of three-stroke reflected signal interference, etc., and achieve the effects of easy signal processing, noise suppression, and simple structure

Inactive Publication Date: 2010-06-09
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology

[0006] In view of this, the main purpose of the present invention is to provide a surface acoustic wave gas sensor and its manufacturing method to solve the interference problem of the three-stroke reflected signal

Method used

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  • Acoustic surface wave gas sensor and manufacturing method thereof
  • Acoustic surface wave gas sensor and manufacturing method thereof
  • Acoustic surface wave gas sensor and manufacturing method thereof

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Embodiment Construction

[0032] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0033] Such as figure 1 as shown, figure 1 It is a flowchart of a method for making a surface acoustic wave gas sensor provided by the present invention, and the method includes:

[0034] Step 101: Apply glue, photolithography, develop, and vapor-deposit metal on the piezoelectric crystal substrate, and make three sets of first interdigital electrodes (interdigital electrodes A) and second interdigital electrodes (interdigital electrodes A) parallel to each other and equally spaced. Finger electrode B) and the third interdigital electrode (interdigital electrode C); as figure 2 As shown, the piezoelectric crystal substrate can be a quartz substrate, a lithium niobate substrate or a lithium germanate substrate, etc. In ...

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Abstract

The invention discloses an acoustic surface wave gas sensor which comprises a piezoelectric crystal substrate, a first interdigital electrode, a second interdigital electrode, a third interdigital electrode and sensitive films, wherein the first interdigital electrode, the second interdigital electrode and the third interdigital electrode are arranged on the surface of the piezoelectric crystal substrate in parallel and at intervals; and the sensitive films capable of absorbing gas to be measured are separately evaporated or coated on the substrate surfaces between the first interdigital electrode and the second interdigital electrode, and between the second interdigital electrode and the third interdigital electrode. The invention also discloses a method for manufacturing the acoustic surface wave gas sensor. The acoustic surface sensor can be used for measuring different gases after matched with different sensitive films, and has the advantages of high sensitivity, simple structure, convenient manufacture, easy signal processing, and compatibility with semiconductor process.

Description

technical field [0001] The invention relates to the field of sensor production, in particular to a surface acoustic wave gas sensor and a production method thereof. Background technique [0002] In 1979, Wohltjen and Dessy first reported the use of surface acoustic wave (SAW) delay line oscillators to detect chemical vapors, which opened the door for people to study a new type of sensor-surface acoustic wave sensors. [0003] The surface acoustic wave gas sensor measures gas with high precision, high resolution, strong anti-interference ability, suitable for long-distance transmission, good measurement reproducibility, easy to interface with computers and microprocessors, and easy to realize miniaturization, integration, and intelligence. No need to work under heating state, high stability, low power consumption and so on. After decades of research, surface acoustic wave sensors are more and more widely used in gas sensors and other aspects. [0004] SAW gas sensor is the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/036
Inventor 李昊峰贾锐李维龙陈晨朱晨昕
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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