44 results about "Measurement reproducibility" patented technology

In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.

The invention discloses a constant temperature integrating sphere spectral analysis device, comprising a sealed shell. The sealed shell is internally provided with a spectrograph and an integrating sphere; the spectrograph receives a light signal emitted from a detection window through a light sampling device; a temperature adjustment and control device is also arranged inside the sealed shell; temperature sensors are respectively arranged inside the integrating sphere and near the spectrograph; and the temperature adjustment and control device and the temperature sensors are electrically connected and used for adjusting and controlling the temperatures inside the integrating sphere, the spectrograph and the sealed shell. The constant temperature integrating sphere spectral analysis device can conveniently and effectively control the working environment temperature of the spectrograph and the temperature inside the integrating sphere, has little dependency on environment conditions of a laboratory, and realizes favorable measurement reproducibility easily and higher measurement precision.

Positional information of a stage is obtained using an interferometer system only during an exposure time when a constant speed drive of the stage is performed to form a pattern. Therefore, the linear measurement of the positional information is secured enough, which makes it possible to linearly drive the stage with high accuracy. Meanwhile, between an acceleration time and a deceleration time in which a step drive is performed, the positional information of the stage is obtained using an encoder system and a surface position measurement system. Therefore, measurement reproducibility of the positional information is sufficiently secured by the mechanical stability of a diffraction grating, which makes it possible to drive the stage precisely to the starting position of the constant speed drive.

Provided is an exposure method that includes setting a first exposure condition so as to calculate a coefficient for predicting the fluctuation in the imaging characteristics of the projection optical system under a certain exposure condition; determining the coefficient and a permissible value calculated from aberration measurement reproducibility based on a fluctuation characteristic model; calculating a predicted amount of the fluctuation in the imaging characteristics under the first exposure condition based on the coefficient; determining whether or not the predicted amount is less than the permissible value for each time instant; and starting calculation of the predicted amount of the fluctuation in the imaging characteristics under a second exposure condition at the time at which it is determined by the determining that the predicted amount is less than the permissible value.

A stage is driven (position control) using a hybrid signal which is obtained by synthesizing an output signal of an interferometer (an interferometer system) and an output signal of an encoder (an encoder system) that are made to pass through a high pass filter and a low pass filter, respectively. A cutoff frequency is set to a frequency corresponding to a speed slightly smaller than the speed of the stage at the time of scanning exposure. This allows the stage to be driven using an interferometer whose linear measurement is high at the time of scanning exposure, and using an encoder whose measurement reproducibility is high at the time of stepping.

The invention discloses a fast measuring device and a measuring method of an optical element. The measuring device comprises a light source system, a light guiding system, a sample placing mechanism, a lighting system, a rear-mounted optical splitting system, an array type photoelectric transformation system and a data analyzing system. The measuring device is a fast, flexible and accurate measuring instrument which is invented aiming at the complex requirement of research and development of optical parts and monitoring of quality of products. The measuring device is characterized by adopting a rear-mounted optical splitting mode and combining a semifixed and adjustable sample platform and a movable lighting system, being capable of measuring optical parameters of transmission, reflection and dispersion for regular or irregular optical elements and adopting an array type photoelectric transformation element to finish signal collection and conversion. The measuring device has the characteristics of fast measuring speed, suitability of samples with complex shapes, good measuring reproduction quality, flexible collocation and low price, thereby being suitable for optical parameter measurement and quality monitoring of various optical elements.

The invention provides a portable potentiometer with three-range switching for DC voltage measurement, which includes three ranges of X10, X1 and X0.1, wherein 11X50/11 Omega is used as a No:1 measuring disc, 11X0.5 Omega is used as a No:2 measuring disc, 0-5.5 Omega is used as a No:3 measuring disc, the three measuring discs are connected with wires, thus no contact resistance and variation exist, the zero potential produced by the lead wire resistance is compensated through the negative potential, in the X10 range, its high measuring limit is 111mv, in the X0.1 range, its minimum resolution is 0.1uV, and good measurement reproducibility can be achieved.

The invention provides a portable potentiometer with three-range for DC voltage measurement, which includes three ranges of X10, X1 and X0.1, wherein 20X5 Omega is used as a No:1 measuring disc, 10X0.55 Omega is used as a No:2 measuring disc, 0-6.05 Omega is used as a No:3 measuring disc, the three measuring discs are connected with wires, thus no contact resistance and variation exist, the zero potential produced by the lead wire resistance is compensated through the negative potential, in the X10 range, its high measuring limit is 211mv, in the X0.1 range, its minimum resolution is 0.1uV, and good measurement reproducibility can be achieved.

The invention discloses a light-splitting color photometer. Test conditions compatible for SCI and SCE are achieved by combination of a dual-light-source system consisting of a first illuminating system and a second illuminating system. The second illuminating system in the dual-light-source system comprises a second illuminating light source, a front lens, a light collecting lens and two adjustable light diaphragms; light emitted by the second illuminating light source is imaged near the light collecting lens by the front lens; the light collecting lens is used for imaging the front lens near a target area; the light emitted by the second illuminating light source is imaged, then the light shape of the light source is more uniform, namely the light source irradiated on a tested sample is more uniform; test data obtained on the basis of the light source is more accurate; the measurement reproducibility is better; the size and the intensity of light spots projected to the tested area can also be adjusted by adjusting the two light diaphragms; the colors of various objects are effectively and accurately measured; in addition, a light eliminating part is also arranged at the periphery of a tested sample taking area; the level of stray light is further reduced; the test accuracy is improved.

The invention provides a DC potentiometer with three-range for DC voltage measurement, which includes three ranges of X10, X1 and X0.1, wherein 11X4 Omega is used as a No:1 measuring disc, 11X0.44 Omega is used as a No:2 measuring disc, 0-4.84 Omega is used as a No:3 measuring disc, the three measuring discs are connected with wires, thus no contact resistance and variation exist, the zero potential produced by the lead wire resistance is compensated through the negative potential, in the X10 range, its high measuring limit is 111mv, in the X0.1 range, its minimum resolution is 0.1uV, and good measurement reproducibility can be achieved.

The invention, which belongs to the field of electrical power module testing, relates to a test adapter for a small-spacing connection terminal. The test adapter comprises a main adapter body manufactured by a conductor. The main adapter body is provided with output voltage sampling holes and load connecting holes; a cuboid crimping body is arranged at the front end of the main adapter body. The adapter includes a left negative adapter, a right negative adapter, a right positive adapter, and a left positive adapter, wherein the left negative adapter and the right negative adapter are connectedwith a negative electrode of a direct-current power supply module and the right positive adapter and the left positive adapter are connected with a positive electrode of the direct-current power supply module; a BNC-to-SMA radio-frequency adapter connected with a standard testing line directly is arranged at the left negative adapter or the right negative adapter; and metal planes for convenientcontact and signal collection of a standard probe are arranged at the front parts of the left positive adapter and the right positive adapter. Therefore, problems that one wiring terminal needs to beconnected with a plurality of testing lines and a sampling probe of an oscilloscope can not be connected are solved and thus reliable and rapid access of a measuring instrument becomes convenient; andbecause the sampling point and the measurement method are fixed, the quality of testing data of the measuring system is enhanced. The measurement reproducibility is high.

The invention provides a portable potentiometer with three-range for DC voltage measurement, which includes three ranges of X10, X1 and X0.1, wherein 11X2 Omega is used as a No:1 measuring disc, 11X0.22 Omega is used as a No:2 measuring disc, 0-2.42 Omega is used as a No:3 measuring disc, the three measuring discs are connected with wires, thus no contact resistance and variation exist, the zero potential produced by the lead wire resistance is compensated through the negative potential, in the X10 range, its high measuring limit is 111mv, in the X0.1 range, its minimum resolution is 0.1uV, and good measurement reproducibility can be achieved.

The invention provides a potentiometer with three-range switching for DC voltage measurement, which includes three ranges of X10, X1 and X0.1, wherein 11X100/11 Omega is used as a No:1 measuring disc, 11X1 Omega is used as a No:2 measuring disc, 0-11 Omega is used as a No:3 measuring disc, the three measuring discs are connected with wires, thus no contact resistance and variation exist, the zero potential produced by the lead wire resistance is compensated through the negative potential, in the X10 range, its high measuring limit is 111mv, in the X0.1 range, its minimum resolution is 0.1uV, and good measurement reproducibility can be achieved.