Off-line detection device of radio frequency generator
A radio frequency generator and off-line detection technology, applied in the direction of instruments, amplification control, gaseous chemical plating, etc., can solve the problems of no calibration, inconvenient measurement, difficult radio frequency generator monitoring, etc., to achieve convenient detection and easy operation Effect
Inactive Publication Date: 2011-12-07
SEMICON MFG INT (SHANGHAI) CORP
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Problems solved by technology
However, when the RF generator is offline, for example, when it fails or needs to be calibrated, it is difficult to monitor the RF generator, let alone calibrate it
Although some radio frequency generators have an interface that can output signals, due to the limitation of the interface type and appearance, the measurement is extremely inconvenient. An existing technology uses wires to lead out the output signal for measurement, but this method is for multiple In terms of measurement, there are more difficulties
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[0029] The embodiment of the present invention provides an off-line detection device of a radio frequency generator, which can provide the control signal required for detecting the radio frequency generator, so as to control the stable output of the radio frequency generator, and can realize the repeated detection of the radio frequency generator conveniently. detection, easy to operate; and, the off-line detection device can also provide the measurement channel of the forward output signal and the feedback output signal of the radio frequency generator to be tested; in addition, the off-line detection device of the radio frequency generator of the present invention utilizes the auxiliary voltage of the radio frequency generator itself, No additional external power supply is required and implementation is simple.
[0030] The specific implementation manners of the present invention will be described in detail below in conjunction with the drawings and embodiments.
[0031] ref...
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The invention provides an off-line detection device for a radio frequency generator, a control unit for generating a control signal and an interface part for connecting the radio frequency generator and serving as a transmission channel for the control signal, so as to realize the control of the working state of the radio frequency generator and its output signal . The offline detection device of the radio frequency generator of the present invention uses the user port of the radio frequency generator itself to use the auxiliary voltage of the radio frequency generator itself as its own working voltage, does not require an additional external power supply, and is simple to implement. In addition, the present invention facilitates and conveniently operates the output signal of the radio frequency generator to be tested for many times, so as to detect and control the output state of the radio frequency generator to be tested.
Description
technical field [0001] The invention relates to a device for detecting a radio frequency generator. Background technique [0002] In the semiconductor film deposition process, it is often necessary to use a radio frequency generator. In physical vapor deposition (PVD), a radio frequency generator is used to apply a high / medium frequency voltage to the cathode target through a matching circuit to convert the grown material from solid to gas, and the vapor of the grown material passes through a low pressure area , condenses on the substrate surface to form a thin film. In plasma chemical vapor deposition (CVD), the RF generator provides high / medium frequency voltage to accelerate the ionized mixed gas to create a plasma gas environment. A Chinese patent application with application number 02105328.6 and titled "Controller of RF Power Generator with Reduced Sensitivity to Cable Length" discloses a radio frequency power generator, which is connected to a load to generate A fo...
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IPC IPC(8): C23C16/44G05F1/66H03G3/00
Inventor 黄国伟
Owner SEMICON MFG INT (SHANGHAI) CORP