Micro inertial sensor with transversely movable electrodes embedded and manufacturing method thereof

A technology of moving electrodes and lateral movement, which is applied to the components of the TV system, the photoplate process of the pattern surface, piezoelectric/electrostrictive/magnetostrictive devices, etc., and can solve the problem of increasing the mass of the sensor vibrator and the distance between the capacitor plates Reduce and other problems, to achieve the effect of mechanical noise improvement
CN101792109AInactive Publication Date: 2010-08-04HANGZHOU DIANZI UNIV
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Applications(China)
Current Assignee / Owner
HANGZHOU DIANZI UNIV
Publication Date
2010-08-04
Estimated Expiration
Not applicable ยท inactive patent

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Abstract

The invention provides a micro inertial sensor with transversely movable electrodes embedded and a manufacturing method thereof. The existing sensors have big noise, poor stability and small range and bandwidth. Sensor mass blocks capable of transverse moving are symmetrically arranged at the two sides of a sensor gate mass block in the sensor. Sensor anchor points are arranged at the two ends of the sensor gate mass block. Gate electrodes are arranged in the sensor mass blocks. Silicon strip groups are arranged at one side of each sensor mass block capable of transverse moving and are arranged corresponding to solid mass blocks. The manufacturing method is characterized by firstly forming fixed counter electrodes on a first substrate, secondly forming an electric insulation layer on the upper surface of a second substrate and forming a floating zone on the lower surface of the second substrate, thirdly bonding the two substrates and finally etching the second substrate to form the sensor. The micro inertial sensor has novel structure, high resolution and sensitivity and simple manufacturing process and is beneficial to lowering the cost and improving the yield.
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Description

technical field

[0001] The invention belongs to the field of micro-electromechanical technology, and relates to a micro-inertial sensor, in particular to a high-resolution micro-inertial sensor in which the relative motion of a variable capacitance plate is represented by synovial film damping, and a transverse movable electrode is embedded on a vibrator. its production method. Background technique

[0002] In recent ten years, accelerometers made with micromechanical technology have been developed rapidly. Its main acceleration detection technologies include piezoresistive detection, piezoelectric detection, thermal detection, resonance detection, electromagnetic detection, light detection, tunnel current detection and capacitance detection. In addition, there are accelerometers based on other detection technologies, such as optical accelerometers, electromagnetic accelerometers, and capacitive accelerometers. The development of optical accelerometers is mainly to combine...

Claims

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