Large capacitance micro inertial sensor based on slide-film damping and manufacturing method thereof

A micro-inertial sensor, sliding film damping technology, applied in the photoengraving process of the pattern surface, the process for producing decorative surface effects, piezoelectric / electrostrictive / magnetostrictive devices and other directions, can solve the problem of pressure film air Large damping, increased sensor mechanical noise, increased sensor vibrator mass, and reduced plate spacing, etc., to achieve the effect of reducing spacing and improving mechanical noise
CN101792108AInactive Publication Date: 2010-08-04HANGZHOU DIANZI UNIV
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Patent Information

Authority / Receiving Office
CN ยท China
Current Assignee / Owner
HANGZHOU DIANZI UNIV
Publication Date
2010-08-04
Estimated Expiration
Not applicable ยท inactive patent

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Abstract

The invention provides a large capacitance micro inertial sensor based on slide-film damping and a manufacturing method thereof. The existing sensors have big noise, poor stability and small range and bandwidth. Silicon strip groups are symmetrically arranged at the two sides of a sensor mass block in the sensor. Sensor anchor points are arranged at the two ends of the sensor mass block. Gate electrodes are arranged in the sensor mass block. Driver mass blocks are arranged corresponding to the silicon strip groups. Fixed counter electrodes are arranged on a first substrate below the sensor mass block. The manufacturing method is characterized by firstly forming the fixed counter electrodes on the first substrate, secondly forming an electric insulation layer on the upper surface of a second substrate and forming a floating zone on the lower surface of the second substrate, thirdly bonding the two substrates and finally etching the second substrate to form the sensor. The micro inertial sensor has novel structure, high resolution and sensitivity and simple manufacturing process and is beneficial to lowering the cost and improving the yield.
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Description

technical field

[0001] The invention belongs to the field of micro-electromechanical technology, and relates to a micro-inertial sensor, in particular to a large-capacitance micro-inertial sensor based on synovial film damping and a manufacturing method thereof. Background technique

[0002] In recent ten years, accelerometers made with micromechanical technology have been developed rapidly. Its main acceleration detection technologies include piezoresistive detection, piezoelectric detection, thermal detection, resonance detection, electromagnetic detection, light detection, tunnel current detection and capacitance detection. In addition, there are accelerometers based on other detection technologies, such as optical accelerometers, electromagnetic accelerometers, and capacitive accelerometers. The development of optical accelerometers is mainly to combine the advantages of light and micromechanics to make sensors with high electromagnetic shielding or good linearity. Amo...

Claims

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