A scanning electron microscope
A technology of electron microscope and electron gun, which is applied in the direction of circuits, discharge tubes, electrical components, etc., can solve the problems of shortening the life of SEM, and achieve the effect of compact structure, high vacuum degree and long life
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[0025] Matters defined in the specification, such as detailed structures and elements, are provided to assist in a comprehensive understanding of the exemplary embodiments of the present invention. Accordingly, those of ordinary skill in the art will recognize that various changes and modifications of the embodiments described herein can be made without departing from the scope and spirit of the invention. Also, descriptions of well-known functions and constructions are omitted for clarity and conciseness.
[0026] see figure 1 , a scanning electron microscope (SEM) according to an exemplary embodiment of the present invention may include a SEM main body 10 , an electron optical unit 20 , a vacuum pump 30 and a control unit 40 . For reference only, an element indicated with reference numeral 50 is a high voltage generating unit to supply high voltage to the electron optical unit 20 .
[0027] Such as figure 1 , 3 As shown in 4, the SEM main body 10 includes a sample holder...
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