InAs/GaSb superlattice infrared photoelectric detector for HPT (Hydrogenated Propylene Tetramer) structure
An electrical detector and superlattice technology, applied in circuits, electrical components, semiconductor devices, etc., can solve problems such as application limitations and high cost
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[0019] see figure 1 As shown, the invention provides a kind of InAs / GaSb superlattice infrared photodetector of HPT structure, comprising:
[0020] A GaSb substrate 1, a GaSb buffer layer 2, a GaSb collection region 3, an InAs / GaSb superlattice base region 4, a base region 5 formed of AlGaAsSb, and an AlGaAsSb emitter region are sequentially prepared on the GaSb substrate 1 by molecular beam epitaxy 6 and GaSb capping layer 7;
[0021] Wherein the GaSb collection region 3 is n-doped with a thickness of 1.5um;
[0022] The InAs / GaSb superlattice base region 4 described therein is composed of no less than 300 InAs layers / GaSb layers with a period of 1 micron grown alternately; wherein the thickness of each layer of GaSb is 3nm, and the thickness of each layer of InAs is determined by the detection wavelength . The InAs / GaSb superlattice base region 4 is used as the light absorption region of the HPT structure, and its function is to convert the incident optical signal into an...
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