Detecting device and method of vertex curvature radius of large-diameter non-spherical reflecting mirror
A technology of vertex curvature and detection device, which is applied to measurement devices, mechanical measurement devices, and mechanical devices, etc., can solve the problems of complex hardware support, poor practicability, and expensive measurement instruments, and achieves high measurement accuracy and simple structure. , the effect of small contact force
Inactive Publication Date: 2012-06-13
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0004] High-precision large-scale measuring instruments such as dual-frequency laser interferometers and laser trackers can achieve high-precision detection of large-scale optical processing, but such measuring instruments are expensive and require the introduction of complex hardware support, which is not very practical
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[0026] The present invention will be further described below in conjunction with the accompanying drawings. The device for detecting the vertex curvature radius of a large-aperture aspheric mirror includes: a front micrometer head 2, a combined measuring rod 3, a rear micrometer head 4, a vertex measurement reference converter 5 and two support frames 6, and a vertex measurement reference converter 5 Installed in the center hole of the mirror 7 to be tested, the front micrometer head 2 and the rear micrometer head 4 are respectively installed at the two ends of the combined measuring rod 3, the measurement line of the front micrometer head 2 and the rear micrometer head 4 is connected with the combination The measuring rod 3 is coaxial, and the combined measuring rod 3 is installed on the main optical axis of the measured reflector 7 through two supporting frames 6 .
[0027] Micrometer 2 and 4 have their own zero position, which can be locked at any point within the range, wi...
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The invention relates to detecting device and method of a vertex curvature radius of a large-diameter non-spherical reflecting mirror. The device comprises an assembly measuring rod, micrometer heads, a vertex measuring reference converter and a bracket, wherein the vertex measuring reference converter is installed in a center hole of a main mirror; the micrometer heads are installed at both endsof the assembly measuring rod; and the assembly measuring rod is supported and installed on an optical axis of the main mirror by the bracket. The device is calibrated at first by adopting a high-precision measuring instrument before measurement and is adjusted during measurement, and a measuring result is calculated finally by measurement. The invention not only can be used for the online detection of the processing of a non-spherical main mirror, but also can ensure the distance of the main mirror and a secondary mirror when an optical system is installed and debugged. The invention has high measuring precision, simple and convenient use, high efficiency and good repeatability, prevents adopting an expensive large-size measuring instrument, simplifies the configuration of a measuring system, reduces the detecting cost, and is suitable for large optical processing enterprises, scientific research institutions and detecting and metering units.
Description
technical field [0001] The invention relates to a measurement technology in the field of optical processing and detection, in particular to a device and method for detecting the vertex curvature radius of a large-diameter aspheric mirror. Background technique [0002] With the development of science and technology, large-aperture aspheric mirrors have been more and more widely used in astronomy, space optics and military fields. The diameter and radius of curvature are getting larger and larger, and the requirements for optical processing and testing are higher. new challenge. At present, the detection of large-diameter aspheric surfaces generally adopts the compensator inspection method. This method is relatively mature. Design a special compensator for a specific aspheric surface. After completing the processing of the spherical surface, it is necessary to place the compensator strictly according to the optical design distance Use an interferometer to perform real-time de...
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IPC IPC(8): G01B5/213
Inventor 陈宝刚王建立杨飞明名林旭东
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI