Automatic control device for use in Czochralski crystal growth

An automatic control device and crystal growth technology, which is applied in crystal growth, single crystal growth, and self-melt pulling method, etc., can solve the problems of out-of-control growth, unstable quality, unfavorable production scale, etc., to reduce errors and stabilize products Quality, the effect of reducing labor costs

Inactive Publication Date: 2010-09-15
成都东骏激光股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Once the crystal size exceeds the size of the viewing window, the human eye can no longer observe, which will cause uncontrolled growth
[0004] 2. Strong dependence on individual experience of people, the shape of the crystals grown

Method used

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  • Automatic control device for use in Czochralski crystal growth
  • Automatic control device for use in Czochralski crystal growth

Examples

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Example Embodiment

[0013] Such as figure 1 The shown pulling method crystal growth automatic control device includes a support base 7, a pulley 5, a seed crystal rod 8 passing through the support base, a temperature controller (not shown in the figure), a weighing chamber 4, a weight sensor 2, Bearing seat 6, sliding contactor 1, cooling water jacket 9, seed crystal rod positioning plate 10, connecting piece 3; the weighing chamber is located on the upper part of the support seat, and a bearing seat is fixedly connected between the bottom wall of the weighing chamber and the support seat , The outer wall of the weighing chamber is connected to the pulley; the sliding contactor is fixedly connected to the upper end of the weighing chamber, the weight sensor is fixedly connected to the upper part of the chamber of the weighing chamber, and the signal line of the weight sensor passes through the sliding contactor and the controller (not shown in the figure) Out) connection, the output end of the con...

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PUM

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Abstract

The invention discloses an automatic control device for use in Czochralski crystal growth. The device comprises a supporting seat, a seed rod, a weighing chamber, a weight sensor, a sliding contactor, a cooling water jacket and a seed rod positioning disk; the weighing chamber is positioned on the upper part of the supporting seat; a bearing seat is fixedly connected between the bottom wall of the weighing chamber and the supporting seat; the outer wall of the weighing chamber is connected with a transmission device; the sliding contactor is fixedly connected with the upper end of the weighing chamber; the weight sensor is fixedly connected with the upper part of a chamber of the weighing chamber; a signal wire of the weight sensor passes through the sliding contactor and is connected with the controller; the output end of the controller is connected with a temperature controller; and one end of the seed rod passes through the center of the bearing seat and is flexibly connected with the weight sensor, and the other end of the seed rod passes through the cooling water jacket which is fixedly connected with the lower part of the supporting seat and the seed rod positioning disk which is fixedly connected with the bottom of the cooling water jacket. A temperature control device for crystal growth is controlled by weight information of seed crystal acquired by a controller, so automatic control of a growing process is realized. The automatic control device has the advantages of reducing personal error, enhancing product quality and lowering labor cost.

Description

technical field [0001] The invention belongs to the technical field of crystal growth, in particular to an automatic control device for crystal growth by pulling method. Background technique [0002] In the original pulling method crystal growth device, the crystal growth is controlled manually. Observe the crystal diameter with human eyes, and then decide whether to increase or decrease the temperature for crystal growth according to the experience of the operator. This technology has the following disadvantages: [0003] 1. This method is not suitable for the growth of large-sized crystals. Once the crystal size exceeds the size of the viewing window, the human eye can no longer observe, which will cause uncontrolled growth [0004] 2. Strong dependence on individual experience of people, the shape of the crystals grown in this way is not repeatable and the quality is not stable [0005] 3. This method must rely on the control of people, and has high requirements on th...

Claims

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Application Information

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IPC IPC(8): C30B15/24
Inventor 肖兵王国强周世斌石全洲
Owner 成都东骏激光股份有限公司
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