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Tri-axis angular rate sensor

An angular rate sensor and sensing technology, applied in the direction of instruments, steering sensing equipment, gyroscope/steering sensing equipment, etc.

Inactive Publication Date: 2010-09-22
毛敏耀
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, that solution requires three separate sensors and three separate integrated circuits for drive control and sensing

Method used

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Examples

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Embodiment Construction

[0021] Such as figure 1 As shown in , a velocity sensor generally has four generally planar butterfly wing-shaped proof masses 20, 22, 24, 26 that lie in an x, y reference plane when the device is at rest. The proof masses are arranged around the intersection of the X and Y axes (ie the center 27 ), with the masses 20, 24 along the X axis and the masses 22, 26 along the Y axis.

[0022] The proof mass is mounted on a support frame, or sensing frame 28 , by flexible beams or flexures 30 . These flexures constrain the linear movement of each mass in a drive mode relative to the sensing framework along a predetermined axis, which is the drive axis for that mass. The drive axes of the masses 20, 24 are along the X-axis and the drive axes of the masses 22, 26 are along the Y-axis.

[0023] The flexures for each mass are more flexible in the direction along the drive axis of that mass and stiffer in the other directions. The use of multiple sets of flexures for each mass further ...

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Abstract

Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.

Description

technical field [0001] The present invention relates generally to angular rate sensors or gyroscopes, and more particularly to a rate sensor for monitoring rotation about three input axes. Background technique [0002] Many applications in the automotive and consumer markets require the measurement of angular velocity about three orthogonal axes. Currently, the most common solution is to use three separate rate sensors, each measuring rotation about an axis. However, that solution requires three separate sensors and three separate integrated circuits for drive control and sensing. Contents of the invention [0003] Generally speaking, it is an object of the present invention to provide a new and improved angular rate sensor or gyroscope. [0004] Another object of the present invention is to provide a rate sensor or gyroscope of the above character which overcomes the limitations and disadvantages of prior art rate sensors. [0005] These and other objects according to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56
CPCG01C19/5719
Inventor 毛敏耀
Owner 毛敏耀
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