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Defect correction device and defect correction method

A defect and method technology, applied in the field of correction in the field of flat panel displays, can solve the problems of reducing efficiency, increasing the number of operators, and increasing equipment costs and operating staff time, and achieves the effect of avoiding defects, improving quality, and shortening correction processing time.

Inactive Publication Date: 2013-11-13
SONY CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when such an avoidance method is adopted, since the number of defect correcting devices and operators increases significantly, the cost of equipment and man-hours of operators will increase significantly, resulting in a problem of lowering efficiency.

Method used

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  • Defect correction device and defect correction method
  • Defect correction device and defect correction method
  • Defect correction device and defect correction method

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Embodiment Construction

[0102] Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

[0103] The following items are explained in order.

[0104] 1. The first embodiment (optimization example of object size and template implementation sequence)

[0105] 1. The first embodiment

[0106] summary

[0107] In this embodiment, the case where a display device is constituted by a wiring board as the target is described, that is, a plurality of wiring portions constituting a wiring board composed of a TFT substrate or the like are formed in a plurality of pixels of a two-dimensional matrix corresponding to a display device. The situation is described.

[0108] figure 1 It is a diagram showing a configuration example of a substrate to be inspected. figure 2 yes means figure 1 A map of the repetitive patterning area within the indicated substrate.

[0109] In this example, wiring substrates 1 for four flat panel displays are formed on a commo...

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Abstract

A defect correction device remarkably improves working efficiency of a defect correction procedure and improves the quality of defect correction. The device checks a multi-layer substrate formed with a repeated composition, and extracts position information of the defect and feature information of the defect in the repeated composition. Then the defect correction method detecting the defect is read from a data base. And then, sizes of the objects contained in the read defect correction method and the correction implement order are optimized relative to the defect correction device. And, the defect correction method optimized by the sizes and the orders is used for controlling a defect correction portion implementing the defect correction.

Description

technical field [0001] The present invention relates to a defect correction technique in a manufacturing process of a display device. In particular, it relates to a defect correction device and a defect correction method suitable for correcting defects in device patterns and wiring patterns formed on a substrate such as a TFT (Thin Film Transistor) substrate of a flat panel display (FPD). Background technique [0002] Currently, so-called flat panel displays such as organic EL (Electro Luminescence) displays and liquid crystal displays are widely used as display devices. These display devices are composed of elements such as thin film transistors (TFTs) and capacitors, and a wiring board including various conductive members such as a plurality of wirings (for example, signal wirings and potential supply wirings) electrically connected to these elements. [0003] In the mass production of the wiring board constituting the display device, various defects occur, such as short ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1362
Inventor 筒井亚希子清井清美
Owner SONY CORP
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