Workpiece turnover unit, vacuum film-forming device and workpiece assembly unit

Abstract

The present invention provides a workpiece turnover unit, a vacuum film-forming device and a workpiece assembly unit, wherein the workpiece turnover unit is capable of keeping a cavity of the vacuum film-forming device to be vacuum so as to film by turns on two faces of the workpiece. The vacuum film-forming device is capable of forming film on two faces of the workpiece continuously and directly that the cavity is of a vacuum state. A workpiece assembly unit (20) is arranged on a plurality of workpiece assembly parts (18) which are formed on a dome sloped surface in the cavity of the vacuum film-forming device. The workpiece assembly unit (20) includes a clamp support frame (25) for rotating-freely supporting a workpiece clamp (22) fixed with a glass plate (21) by a pair of rotating shafts, and a ball guiding frame (50) having a locking component (60) for locking the clamp support frame (25) from rotating. The ball guiding frame (50) is provided with a ball (58) held at a loading position through a rib (56). If a rotating speed of the dome is increased, the ball (58) may collide with a ball collision part (62) of the locking component (60) across the rib (56) by a centrifugal force, here, a locking claw (63) moves from a locking position of the workpiece clamp (22) and the workpiece clamp (22) is turned over.

Description

technical field [0001] The present invention relates to a workpiece reversing unit and a workpiece assembling unit in a vacuum film forming device for forming a film-forming substance on the front and back of a circular, square or other plate-shaped object to be filmed (workpiece). Background technique [0002] In a general vacuum film forming device, a workpiece holding disk such as a rotating dome in a substantially umbrella shape or a rotating drum in a polygonal cylindrical shape that rotates around a rotating shaft in a chamber that is vacuumed by a vacuum pump is provided, so that The film-forming substance emitted by the film-forming substance generating source in the cavity is evenly attached to the surface of the workpiece such as a glass plate. When a plurality of sources of film-forming substances are provided, different film-forming substances are sequentially deposited on the workpiece through a shielding plate or the like to form a film deposited on the workpie...

AI Technical Summary

Problems solved by technology

[0005] However, although a film can be formed on the front and back of the workpiece in a vacuum, the flip is only once, and the film can be formed once on the front and back, so for multi-layer coatings such as the above-mentioned multiple film-forming substances, Each layer needs to open the cavity to reset the film-forming posture

Also, to open the chamber, the vacuum state must be released, and the internal temperature is also lowered from high temperature (for example, 100 to 400°C) to close to room temperature, so after resetting the workpiece, it must be set to high temperature and vacuum again, which takes a long time

[0006] In addition, when a plurality of different film-forming substances are formed into a film, the temperature of the film-forming substance (for example, forming a film at 400°C and then forming a film at 100°C, etc.) is sometimes different. In the method of continuous multi-layer film formation on the other side after filming, the stage of film formation on one side will cause warpage on the workpiece

Especially when the workpiece is a thin glass plate, it sometimes causes large warping and is not durable

[0007] In addition, the device described in Patent Document 1 must have a driving mechanism such as a motor in order to turn the workpiece inside the cavity. Even if the conventional device is modified, a large-scale change is required, and a large burden will be added in terms of space and cost.

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