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Method for preparing large-area two-dimensional super-structure material

A large-area, physical deposition technology, which is applied in the field of preparation of large-area two-dimensional metamaterials, can solve the problems of inability to prepare open resonant ring structures and difficulties in large-area superstructure materials, and achieve low equipment requirements, low cost, cost reduction effect

Inactive Publication Date: 2011-12-21
NANJING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, such split resonant ring structures cannot be prepared by simple nanoimprinting techniques.
Therefore, it is very difficult to prepare cheap large-area metamaterials

Method used

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  • Method for preparing large-area two-dimensional super-structure material
  • Method for preparing large-area two-dimensional super-structure material
  • Method for preparing large-area two-dimensional super-structure material

Examples

Experimental program
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Effect test

Embodiment 1

[0031] Such as figure 1 As shown, the present embodiment comprises the following steps: (1) Arranging large-area two-dimensional hexagonal close-packed colloidal crystals 2 on a substrate 1: injecting the suspension of monodisperse colloidal microspheres into the substrate 1, leaving it to dry , the microspheres of colloidal crystals 2 in a monodisperse state undergo self-organization under the action of capillary force, forming an ordered large-area two-dimensional hexagonal close-packed structure. In this step, the colloidal crystal 2 is a polystyrene microsphere with a large-area monodomain two-dimensional hexagonal close-packed structure, the diameter of the microsphere of the colloidal crystal 2 is 1.59 μm, and the substrate 1 is a silicon wafer.

[0032] (2) Adopting an angle-resolved vacuum coating method, using the colloidal crystal 2 obtained in step (1) as a mask, through the pores between the microspheres of the colloidal crystal 2, to ensure the projection of the d...

Embodiment 2

[0039] Such as Figure 4 As shown, in this embodiment, the microsphere diameter is 1.0 μm, the metal deposition angle is 10° and -10°, and other implementation conditions are the same as in Embodiment 1.

Embodiment 3

[0041] Such as Figure 5 As shown, in this embodiment, the microsphere diameter is 1.0 μm, the metal deposition angle is 7.5° and -7.5°, and other implementation conditions are the same as in Embodiment 1.

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Abstract

The invention discloses a method for preparing a large-area two-dimensional super-structure material, comprising the following steps: large-area single domain two-dimensional packed hexagonal colloid crystal is arrayed on a substrate; the physical deposition method for angle identification is adopted, the colloid crystal obtained in the last step serves as a mask plate, triangular metal nano particles are deposited on the substrate by penetrating through pores among the colloid crystal microballoons; the colloid crystal microballoons are removed to obtain the super-structure material with thetwo-dimensional metal nano structure. In the invention, colloid microballoons of different dimensions can be chosen to conveniently regulate dot matrix period and size of the triangular; angle and time of nano particle deposit can be adjusted to control the length of the bottom margin of two partially overlapped subunits and the thickness of the subunits so as to adjust electromagnetic response of the super-structure material; and the super-structure material is prepared in combination with the film coating technology in a self-organizing manner without complex technologies such as the electron beam exposure technology, as a result, the cost is greatly reduced, the technology is simple, the facility request is not high and the expense is low.

Description

technical field [0001] The present invention relates to a method for preparing a metamaterial, in particular to a method for preparing a large-area two-dimensional metamaterial. Background technique [0002] At present, metamaterials have attracted extensive attention due to their unique electromagnetic response and their wide application prospects in negative refraction materials, perfect lenses and stealth materials. How to quickly and effectively prepare large-area, especially centimeter-scale metamaterials has always been a hot issue of concern. So far, the methods for preparing super-purchased materials mainly include electron-beamlithography (see S.Linden et al., Science 306, 1351, 2004.), focused-ion beam technology (focused-ion beam) (see T.J.Yen et al.Science 303, 1494, 2004.), nanoimprint lithography (nanoimprint lithography) (see N.Feth, C.Enkrich, M.Wegener, S.Linden, Opt.Express, 15, 501, 2007. )Wait. Typical designs of metamaterials include split resonant ri...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04
Inventor 曹志申潘剑詹鹏陈卓孙洁闵乃本王振林
Owner NANJING UNIV