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Method for eliminating fundamental waves and odd harmonics of nonlinear errors in wave detection method

A non-linear error and odd harmonic technology, applied in the direction of measuring devices, instruments, special recording/indicating devices, etc., can solve problems such as difficulties, and achieve the effect of powerful functions, wide application range, and increased cost

Inactive Publication Date: 2011-09-28
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

But the problem is that if you want to reduce the nonlinear error by an order of magnitude, such as reducing the nonlinear error to one percent, you need hundreds of times the reentrant optical path, and generally speaking, this is difficult

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  • Method for eliminating fundamental waves and odd harmonics of nonlinear errors in wave detection method
  • Method for eliminating fundamental waves and odd harmonics of nonlinear errors in wave detection method
  • Method for eliminating fundamental waves and odd harmonics of nonlinear errors in wave detection method

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Embodiment Construction

[0034] Such as figure 1 As shown, taking the optical application as an example, on the basis of the original laser heterodyne interferometry, the method of the present invention adds the part in the dotted line box in the figure to cooperate with the original laser heterodyne interferometry To realize the principles and functions described in the present invention.

[0035] First, the working principle of the original laser heterodyne interferometry method is explained: the laser is emitted by the laser 1, and the transmitted light through the first beam splitter 2 enters the acousto-optic device 3, and is frequency-shifted by the acousto-optic device 3 and then exits to the second The beam splitter 4, the transmitted light through the second beam splitter 4 is reflected back by the measuring prism 5, and is incident on the third beam splitter 6, the light reflected by the third beam splitter 6 and the light reflected by the second reflector 10 pass through the first The pola...

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Abstract

The invention discloses a method for eliminating fundamental waves and odd harmonics of nonlinear errors in a wave detection method, which belongs to the technical field of precision measurement. In the method, in a laser heterodyne interferometry measurement process, interference light carrying measured physical quantity information is received by two photoelectric detectors; phases of periodic nonlinear errors in the two detected paths are made to be opposite by regulating or setting an optical path difference; and then the fundamental wave components and the like dominated in the periodic nonlinear errors are eliminated in subsequent electronic processing. The method of the invention has the advantages of eliminating the main parts of the nonlinear errors, improving precision and reducing the nonlinear errors by more than 2 to 3 orders of magnitude.

Description

technical field [0001] The invention belongs to the technical field of using wave methods in precision measurement technology, including heterodyne interferometry, and relates to a method for eliminating fundamental waves and odd harmonics of nonlinear errors in wave detection methods. Background technique [0002] In the real material world, there are many material carriers in the form of motion such as fluctuations. We can use light waves or other forms of electromagnetic waves as an example to discuss without loss of generality. Laser heterodyne interferometry is a typical method that uses fluctuations to measure. [0003] Laser heterodyne interferometry can be used to measure physical quantities such as displacement and vibration, and is currently one of the best nanometer measurement methods. This method is to convert the measured displacement into the frequency or phase change of the heterodyne signal, and then measure this change. Since the frequency of the heterodyn...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D3/036
Inventor 孙强李也凡
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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