Miniature electromagnetic broadband vibration energy harvester based on permanent magnet assay

A technology of vibration energy collection and permanent magnet array, which is applied in the field of micro-electromechanical and can solve the problems of numerous and complicated manufacturing process steps, difficult control of cantilever beam characteristics, and difficulty in mass production.

Inactive Publication Date: 2011-01-12
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although part of the process is compatible with the IC process, permanent magnets are still assembled by hand, and it is difficult to control the characteristics of the cantilever beam. The overall manufacturing process is complicated and difficult to mass produce.

Method used

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  • Miniature electromagnetic broadband vibration energy harvester based on permanent magnet assay
  • Miniature electromagnetic broadband vibration energy harvester based on permanent magnet assay
  • Miniature electromagnetic broadband vibration energy harvester based on permanent magnet assay

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] A miniature electromagnetic broadband vibration energy harvester based on a serpentine spring connected by a permanent magnet array composed of 9 circular permanent magnets

[0034] Such as figure 1 As shown, this embodiment includes: an insulating substrate 1, a planar spiral induction coil 5, twelve vibration pickup structures 3, 4, 6-15, and twelve corresponding support structures 2, of which: the insulating substrate 1, the planar The spiral induction coil 5 and the twelve vibration pick-up structures 3, 4, 6-15 are fixedly arranged from bottom to top, and the twelve support structures 2 are respectively located on the plane spiral induction coil 5 and the vibration pick-up structures 3, 4, 6-15 And fixedly connected with the insulating substrate 1.

[0035] The insulating substrate 1 is made of quartz or glass.

[0036] The plane spiral induction coil 5 is an induction coil winding structure, specifically a square or circular multi-layer multi-turn spiral metal copper co...

Embodiment 2

[0044] A miniature electromagnetic broadband vibration energy harvester based on a permanent magnet array composed of 9 circular permanent magnets connected by a polymer film

[0045] Such as Figure 4 As shown, the basic structure of this embodiment is the same as that of embodiment 1. The serpentine spring, connecting piece and gasket electroplating layer in embodiment 1 are connected by polymer film to realize the permanent magnet array and the permanent magnet array and support Flexible connection between structures.

Embodiment 3

[0047] Miniature electromagnetic broadband vibration energy harvester based on permanent magnet array sandwich structure

[0048] Such as Figure 5-7 As shown, this embodiment includes: a first insulating substrate 1 and a first planar induction coil 5 thereon, a vibration pickup structure 3, 4, 6-15, a first support structure 16, a second support structure 19, an inverted The second insulating substrate 17 and its second planar induction coil 18, in which: the first insulating substrate 1 and the second insulating substrate 17 are respectively arranged opposite to each other, and the first supporting structure 16 and the second supporting structure 19 are respectively located in the first insulating substrate. The inner side of the substrate 1 and the second insulating substrate 17 form a sandwich structure. The vibration pickup structures 3, 4, 6-15 are respectively located in the middle of the sandwich structure and the first planar spiral induction coil 5 and the second plana...

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Abstract

The invention discloses a miniature electromagnetic broadband vibration energy harvester based on a permanent magnet assay and relates to the technical field of micro-electro-mechanical systems, which comprises an insulating substrate, a planar spiral induction coil, a vibration pick-up structure and a support structure, wherein the insulating substrate, the planar spiral induction coil and the vibration pick-up structure are sequentially fixedly arranged from bottom to top, and the support structure is positioned on the outer sides of the planar spiral induction coil and the vibration pick-up structure and fixedly connected with the insulating substrate. The device can realize the broadband vibration energy harvesting by superposition of various permanent magnets under different vibration states in a circular permanent magnet array which is connected through a spring under the different vibration modes. The permanent magnet array is integrally manufactured by utilizing the micro-structure patterning method; furthermore, as the patterned permanent magnets can have thicker micro-structures, the miniature electromagnetic broadband vibration energy harvester has better energy harvesting and transformation efficiency in comparison with electroplated permanent magnets and is compatible with the IC process and easy to realize the batch processing.

Description

Technical field [0001] The invention relates to a device in the field of micro-electromechanical technology, in particular to a miniature electromagnetic broadband vibration energy harvester based on a permanent magnet array. Background technique [0002] With the continuous development of micro-electromechanical systems (MEMS) and wireless sensor networks, how to power them has become a major obstacle to their development. Commonly used batteries and power lines are inconvenient to operate and use, especially for wireless sensor network communication. Due to its long service life and wide distribution of nodes, the working position of the sensor is difficult to reach in some places. Replace the battery or use the power line to supply power. In many cases it is impractical. The vibration energy harvester can convert the vibration energy in the surrounding environment into electrical energy to supply power to the micro components. However, the vibration energy harvester obtained...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00
Inventor 丁桂甫陶凯杨卓青王艳周海林
Owner SHANGHAI JIAO TONG UNIV
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