Method and device for detecting water oxygen infiltration index in device packaging

A device packaging, water and oxygen technology, applied in the direction of measuring devices, permeability/surface area analysis, scientific instruments, etc., can solve the problems of long time and difficulty in identifying and estimating the corroded area, so as to improve the detection accuracy and shorten the detection cycle Effect

Inactive Publication Date: 2011-01-19
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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Problems solved by technology

This method can calculate the average speed of water and oxygen penetration in a certain period of time, but it is difficult to identify and estimate the corroded area, especially when there is still a small amount of Ca in the corroded area that has not reacted with water and oxygen, there is a large error , moreover, this method takes a long time

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  • Method and device for detecting water oxygen infiltration index in device packaging
  • Method and device for detecting water oxygen infiltration index in device packaging

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Embodiment Construction

[0021] The present invention innovatively proposes a method for detecting the water-oxygen permeation index of device packaging and its detection device, which can quickly, accurately and online detect the water-oxygen permeation rate and the total amount of permeation, and the sensitivity is as high as 1.0×10 -6 g·m -2 / d.

[0022] The main characteristic content of this detection method comprises the following steps:

[0023] (1) Vacuum deposit a layer of active metal film on the active area of ​​the quartz crystal oscillator;

[0024] (2), the quartz crystal oscillator is transferred among the glove box under the condition of isolating the air, and the water and oxygen content in the glove box is all lower than 0.1ppm;

[0025] (3), in the glove box, put the quartz crystal oscillator into the test box, and seal it with a packaging structure, the packaging structure includes a substrate, a packaging film or a complete set of substrate and packaging film;

[0026] (4) Conn...

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Abstract

The invention discloses a method and a device for detecting a water oxygen infiltration index in device packaging. The method comprises the following steps of: firstly, preparing a quartz crystal plated with an active metal layer; secondly, transferring the quartz crystal to a test box under the condition that air is isolated and sealing by using a packaging structure and a packaging method the same as the device packaging; and finally, connecting the test box with a crystal oscillator, a crystal controller and a power supply to form a quartz microbalance, switching on the power supply, sensing the piezoelectric effect and mass loading effect of the quartz crystal through the crystal controller, outputting the piezoelectric effect and mass loading effect to the microbalance in real time, calculating the increased mass of a metal film after infiltrated water is absorbed and then calculating the water oxygen infiltration rate and total infiltrated water oxygen content in unit time. The method and the device can be used for detecting the water oxygen infiltration rate in real time on line in the packaging of a water oxygen sensitive device, have the detection limit of lower than 5*10<-6>g.m<-2> / d, and can meet the limit detection requirement of packaging of organic photoelectric device products on water gas infiltration rate.

Description

technical field [0001] The invention relates to a method and a detection device for detecting water and oxygen penetration indicators. In particular, it relates to a method for fast and precise detection of the packaging structure of water-oxygen sensitive devices (such as organic light-emitting diodes (OLED), organic photovoltaic devices, organic thin-film transistors, etc.) at a lower level of water-oxygen permeation rate and total penetration and its detection device. Background technique [0002] The application and industrialization of rapidly developing organic electronic devices, such as OLED display and white light lighting, organic solar cells, organic thin film transistors, sensors, etc., all need to solve the problem of packaging, because the water and oxygen components in the atmospheric environment can cause organic Rapid aging of devices. Studies have shown that the use of high-performance waterproof and oxygen-permeable materials and packaging technologies c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N15/08
Inventor 苏文明崔铮张东煜
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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