Method and device for detecting water oxygen infiltration index in device packaging
A device packaging, water and oxygen technology, applied in the direction of measuring devices, permeability/surface area analysis, scientific instruments, etc., can solve the problems of long time and difficulty in identifying and estimating the corroded area, so as to improve the detection accuracy and shorten the detection cycle Effect
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[0021] The present invention innovatively proposes a method for detecting the water-oxygen permeation index of device packaging and its detection device, which can quickly, accurately and online detect the water-oxygen permeation rate and the total amount of permeation, and the sensitivity is as high as 1.0×10 -6 g·m -2 / d.
[0022] The main characteristic content of this detection method comprises the following steps:
[0023] (1) Vacuum deposit a layer of active metal film on the active area of the quartz crystal oscillator;
[0024] (2), the quartz crystal oscillator is transferred among the glove box under the condition of isolating the air, and the water and oxygen content in the glove box is all lower than 0.1ppm;
[0025] (3), in the glove box, put the quartz crystal oscillator into the test box, and seal it with a packaging structure, the packaging structure includes a substrate, a packaging film or a complete set of substrate and packaging film;
[0026] (4) Conn...
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