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Vacuum magnetic control coating process

A vacuum coating machine and magnetron technology, applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve the problems of poor coating effect and single color, and achieve low cost, simple process, and easy The effect of implementation

Inactive Publication Date: 2013-02-13
东莞星晖真空镀膜塑胶制品有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Traditional vacuum magnetron coating and ion coating technology, such as the Chinese patent with the patent publication number "CN1137572" and the patent title "Pillar Target Arc Vapor Deposition Device and Method", and the patent publication number "CN101182634", the patent As shown in the Chinese patent titled "Intelligent Integrated Controller for Vacuum Multi-Arc Ion Coating Machine", in the prior art, the use of air magnetron coating and ion coating technology can only plate the target material on the product surface as it is. , single color, poor coating effect

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A vacuum magnetron coating process, comprising the following steps:

[0025] A multi-arc ion magnetron coating machine is selected, and a metal target is selected for coating; in a preferred embodiment, the metal target is selected from 99.99% titanium target;

[0026] Of course, the metal target can also be selected from one of stainless steel target, chromium target, nickel target and titanium alloy target. Different types of metal targets can be used to obtain coatings with different color effects.

[0027] Put the product into the vacuum chamber of the multi-arc ion magnetron coating machine.

[0028] The multi-arc ion magnetron coating machine vacuumizes the vacuum chamber, and the vacuum degree in the vacuum chamber reaches 10×10 -2 Pa~2×10 -2 After Pa, close the grating valve;

[0029] In a preferred embodiment, before filling the discharge medium gas into the vacuum chamber, the preferred value of the vacuum degree of the vacuum chamber is 8×10 -2 Pa~4×10 ...

Embodiment 2

[0043] A vacuum magnetron coating process, comprising the following steps:

[0044] A multi-arc ion magnetron coating machine is selected, and a vacuum coating machine with a diameter of 1.2 meters is selected for the multi-arc ion magnetron coating machine, and a titanium target of 99.99% is selected.

[0045] Put the product into the vacuum chamber of the multi-arc ion magnetron coating machine.

[0046] The multi-arc ion magnetron coating machine vacuumizes the vacuum chamber, and the vacuum degree in the vacuum chamber reaches 10×10 -2 Pa~2×10 -2 After Pa, close the grating valve.

[0047] Fill the vacuum chamber with the discharge medium gas, the discharge medium gas is argon, so that the vacuum degree of the vacuum chamber reaches 1-5Pa, the flow rate of the discharge medium gas is 100-400ml / s, and the gas charged into the vacuum chamber is adjusted during the coating process The flow of argon makes the coating on the surface of the product have different color effect...

Embodiment 3

[0052] A vacuum magnetron coating process, comprising the following steps:

[0053] A multi-arc ion magnetron coating machine is selected, and a vacuum coating machine with a diameter of 1.2 meters is selected for the multi-arc ion magnetron coating machine, and a titanium target of 99.99% is selected.

[0054] Put the product into the vacuum chamber of the multi-arc ion magnetron coating machine.

[0055] The multi-arc ion magnetron coating machine vacuumizes the vacuum chamber, and the vacuum degree in the vacuum chamber reaches 10×10 -2 Pa~2×10 -2 After Pa, close the grating valve.

[0056] Charge the discharge medium gas into the vacuum chamber, the discharge medium gas is a mixed gas of argon and oxygen, the flow rate of the discharge medium gas is 50-300ml / s, in a preferred embodiment, the ratio of the two gases is from 2:1 to Choose from a range of 1:3; as the oxygen ratio increases, the color changes from off-white to green and purple.

[0057] During the coating p...

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PUM

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Abstract

The invention discloses a vacuum magnetic control coating process. A multi-arc ion magnetic control coating machine is used for coating; and the film coated on the surface of a product by the same metal target has different color effects by regulating the components, proportion or flow rate of discharge medium gas introduced into a vacuum chamber during the coating. The process is simple and easy to implement, has low cost and can realize colorful film effects by using the same pure target.

Description

technical field [0001] The invention relates to the technical field of coating technology, in particular to a vacuum magnetron coating technology. Background technique [0002] Traditional vacuum magnetron coating and ion coating technology, such as the Chinese patent with the patent publication number "CN1137572" and the patent title "Pillar Target Arc Vapor Deposition Device and Method", and the patent publication number "CN101182634", the patent As shown in the Chinese patent titled "Intelligent Integrated Controller for Vacuum Multi-Arc Ion Coating Machine", in the prior art, the use of air magnetron coating and ion coating technology can only plate the target material on the product surface as it is. , the color is single, and the coating effect is poor. Contents of the invention [0003] The purpose of the present invention is to provide a vacuum magnetron coating process for the deficiencies of the prior art. The process of the present invention is simple, easy to ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35
Inventor 黄伟雄
Owner 东莞星晖真空镀膜塑胶制品有限公司
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