Method for measuring minimum gas flow

A technology of gas flow and measurement method, which is applied in the direction of detecting fluid flow by measuring pressure difference and volume/mass flow generated by mechanical effects, so as to avoid the effect of measurement uncertainty

Active Publication Date: 2011-12-21
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The deflation of the vessel wall is limited to 10 -8 Pa.m 3 Accurate measurement of flow below the / s level

Method used

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  • Method for measuring minimum gas flow
  • Method for measuring minimum gas flow

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Embodiment Construction

[0022] figure 1 Shown is a preferred embodiment of the present invention, comprising gas cylinder 1, fine-tuning valve 2, plenum chamber 3, valve one 4, valve two 5, connecting valve 6, getter pump 7, valve four 8, molecular pump 9 , a backing pump 10, a capacitor film gauge 11, a magnetic levitation rotor gauge 12, and a small hole 13. The gas cylinder 1 is connected to the pressure-stabilizing chamber 3 through the fine-tuning valve 2, and the small hole 13 is connected in parallel with the valve 2 5, and one end passes through the valve 1 4 and The plenum chamber 3 is connected, one end is connected with the vacuum system, the getter pump 7 is connected with the plenum chamber 3 through the connecting valve 6, the backing pump 10 and the molecular pump 9 are connected in series and then connected with the plenum chamber 3 through the valve 48, The capacitive film gauge 11 and the magnetic levitation rotor gauge 12 are directly connected to the wall of the plenum chamber 3 ....

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Abstract

The invention relates to a method for measuring minimum gas flow, comprising the following steps of: (1) pumping gas out of a pressure stabilizing chamber and a vacuum connection pipeline; (2) integrally roasting a device for degassing; (3) enabling the pressure stabilizing chamber to reach ultimate vacuum with a magnitude order of 10-6Pa by using a getter pump; (4) controlling pressure in the pressure stabilizing chamber to slowly rise; (5) charging inert gas with certain pressure into the pressure stabilizing chamber and obtaining gas pressure; (6) leading the inert gas in the pressure stabilizing chamber into a vacuum system through small holes; and (7) obtaining gas flow by utilizing gas pressure and small hole conductance. The method can take good use of the characteristics of a device for measuring minimum gas flow, and completely avoids measuring uncertainty caused by the deflation of the pressure stabilizing chamber and the inner wall of the pipeline, thereby ensuring the effective extension of a lower measuring limit and realizing the accurate measurement of the minimum gas flow with a flow value less than 1*10<-8>Pa.m<3> / s.

Description

technical field [0001] The invention relates to a device and method for measuring extremely small gas flow, in particular to a device and method for measuring extremely small gas flow by using a non-evaporable getter pump. Background technique [0002] In metrology laboratories, high-precision gas micro-flow meters are mostly used to measure and provide known gas flow rates. High-precision gas micro-flow meters mostly use constant-pressure gas micro-flow meters. [0003] The literature "Feng Yan, Cheng Yongjun, Zhang Dixin, etc. Performance test of constant pressure gas micro-flowmeter. Journal of Vacuum Science and Technology 25(3), 2005." When the gas is used, the measurement uncertainty caused by the degassing of the wall is within 10 -8 Pa.m 3 / s magnitude is 0.6%, at 10 -9 Pa.m 3 / s magnitude is 3%. The deflation of the wall is limited to 10 -8 Pa.m 3 Accurate measurement of flow below the / s level. The accurate measurement range of the constant pressure gas mi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F1/34
Inventor 李得天成永军冯焱郭美如徐婕
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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