A measurement system and method for extracting aspheric surface shape based on circular scanning slope

A measurement system and slope extraction technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of high precision and large dynamic range, and achieve the effect of easy operation, reasonable cost and low cost detection means

Active Publication Date: 2016-09-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0011] The technical problem of the present invention is to overcome the deficiencies of the prior art and provide a measurement system and method for extracting the aspheric surface shape based on the circular scanning slope, which solves the detection problem of the large-diameter aspheric surface in the initial throwing stage, without compensator, and has dynamic It has a large range and high precision, and can be used for the detection of the primary mirror in the initial polishing stage, and can effectively guide the surface shape detection of large-diameter aspheric surfaces in the later stage of grinding and early polishing, and has important engineering application value and practical significance

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  • A measurement system and method for extracting aspheric surface shape based on circular scanning slope
  • A measurement system and method for extracting aspheric surface shape based on circular scanning slope
  • A measurement system and method for extracting aspheric surface shape based on circular scanning slope

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[0039] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0040] Such as Figure 7 Shown is a schematic diagram of an aspherical surface shape detection system based on the circular scanning slope, the device includes: a laser 1, a beam expander system lens group 2, a plane lens 3, an imaging CCD4, a one-dimensional electronically controlled mobile platform 5 and the measured Aspheric mirror 6 constitutes. The specific implementation steps are as follows:

[0041] (1) Place the measurement system near the center of curvature of the apex of the measured aspheric mirror 6, and adjust the one-dimensional electronically controlled mobile platform 5 to move along the optical axis.

[0042] (2) Use the laser tracker to locate the distance between the measured aspheric mirror 6 and t...

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Abstract

The invention relates to an aspherical surface shape measuring system and method based on circular-scanning slope extraction, and belongs to the field of photoelectric technology detection. The measuring system comprises a laser device, a beam expanding system lens set, a planar lens used for etching opaque spots, an imaging CCD and a one-dimensional electric control moving table. According to aspherical surface shape measuring based on circular-scanning slope extraction, a compensator is not needed, the dynamic range is large, precision is high, research results can be used for detection of a main lens primary polishing state, related technical difficulties are solved, and important engineering application value and practical significance are achieved.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing and detection, and relates to an optical detection device, in particular to a large-diameter aspheric primary mirror detection system and method. Background technique [0002] The large-aperture high-steep aspheric surface has the advantages of shortening the length of the system, reducing the weight of the system, and improving the imaging quality of the system. Therefore, it has a wide range of applications in the fields of large-aperture astronomical telescopes and space optical systems. Especially in the past 30 years, with the emergence and application of a number of advanced processing and manufacturing technologies such as computer-controlled small grinding head polishing, active grinding disc polishing, and ion beam polishing, it has greatly promoted the use of such systems in space communication and beam orientation. , target observation and recognition and other fields of ap...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 吴永前黄传科范斌刘锋伟
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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