Device for measuring extremely-low gas flow based on static expansion vacuum standard

A technology of gas flow and measuring devices, which is applied in the direction of volume/mass flow generated by mechanical effects, fluid flow detection by measuring pressure difference, etc. It can solve problems such as limiting pressure accurate measurement, improve measurement accuracy and avoid measurement uncertainty Effect

Active Publication Date: 2011-05-11
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Application Information

AI Technical Summary

Problems solved by technology

The transfer coefficient of the magnetic levitation rotor gauge will change with time, gas type and temperature. Capacitance film gauge has thermal runaway effect under low pressure. Uncertainty factor

Method used

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  • Device for measuring extremely-low gas flow based on static expansion vacuum standard
  • Device for measuring extremely-low gas flow based on static expansion vacuum standard

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Embodiment Construction

[0026] Such as figure 1 As shown, it is the extremely small gas flow measuring device based on the vacuum standard of the static expansion method of the present invention, which consists of a pre-stage pressure measurement system 1, a valve one 2, a gas pressure attenuation system 3, a valve two 4, a calibration chamber 5, and a valve three 6 , small hole 7, valve four 8, valve five 9, getter pump 10, valve six 11, molecular pump 12, backing pump 13 and ionization gauge 14.

[0027] The pre-stage pressure measurement system 1 is connected to the gas pressure attenuation system 3 through the valve one 2, the gas pressure attenuation system 3 is connected to the calibration chamber 5 through the valve two 4, the small hole 7 is connected in parallel with the valve four 8, and one end passes through the valve three 6 and the calibration chamber 5, one end is connected to the vacuum system, the getter pump 10 is connected to the calibration chamber 5 through the valve five 9, the ...

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PUM

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Abstract

The invention relates to a device for measuring an extremely-low gas flow based on the static expansion vacuum standard. The device comprises a backing pressure measurement system, a first valve, a gas pressure relief system, a second valve, a calibration chamber, a third valve, a small hole, a fourth valve, a fifth valve, a getter pump, a sixth valve, a molecular pump, a backing pump and an ionization gauge, wherein the backing pressure measurement system is connected with the gas pressure relief system through the first valve, the gas pressure relief system is connected with the calibration chamber through the second valve, the small hole is connected in parallel with the fourth valve to form a parallel structure and then one end of the parallel structure is connected with the calibration chamber through the third valve and the other end of the parallel structure is connected with a vacuum system, the getter pump is connected with the calibration chamber through the fifth valve, the backing pump is connected in series with the molecular pump and then connected with the calibration chamber through the sixth valve, and the ionization gauge is directly connected on the calibration chamber. The invention adopts the gas pressure generated by the static expansion vacuum standard to replace the introduced gas pressure of the gas flow meter in the constant conductance method, so as to further improve the gas flow measurement accuracy.

Description

technical field [0001] The invention relates to a device and method for measuring extremely small gas flow, in particular to a device and method for measuring extremely small gas flow based on a vacuum standard of static expansion method. Background technique [0002] In metrology laboratories, high-precision gas micro-flow meters are mostly used to measure and provide known gas flow rates. [0003] The document "Li Detian. Review of gas micro-flow metering at the German Federal Institute of Physics and Technology (PTB). Journal of Vacuum Science and Technology 23 (4), 2003." introduces the gas flowmeter of German PTB, which is currently at the highest international level. The gas flowmeter developed by PTB works in three different modes: when the flow rate is in the range of (10-8~10-4) Pa.m3 / s, use the constant pressure method; when the flow rate is less than 10-8Pa.m3 / s, use the fixed pressure method Conductance method; when the flow rate is greater than 10-4Pa.m3 / s, use...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/34G01F1/50
Inventor 李得天成永军冯焱徐婕郭美如
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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