Electrode device and reaction atmosphere control system and method using electrode device
A technology for electrode devices and control systems, applied in the direction of electric heating devices, electrical components, feeding devices, etc., can solve the problems of high production costs, complicated atmosphere, and ineffective use of reaction atmosphere, so as to save consumption and increase production rate Effect
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no. 1 example
[0057] Such as figure 2 As shown, the electrode device of the first embodiment of the present invention mainly includes an electrode 20 , an outer cylinder 24 as a casing, and an insulating sheet 29 electrically insulating the electrode from the outer cylinder 24 . The gas path 22 is formed between the electrode 20 and the outer cylinder 24 .
[0058] Wherein, the electrode 20 as the cathode is arranged on the central axis position of the outer cylinder 24, and the electrode 20 is preferably a graphite rod, and the end of the electrode 20 is connected to the insulating sheet 29, and the front end of the electrode 20 stretches out of the outer cylinder 24 to be compatible with the outer cylinder 24. The anode is in contact with the counter electrode 31 for arc discharge. The axis position of the electrode 20 is connected with the connecting pipe 27, and the electrode device can be fixed to the synthesis furnace by means of the connecting pipe 27, and the cable for supplying p...
no. 2 example
[0063] The difference from the first embodiment is that if Figure 4 As shown, the outer cylinder 24 also includes an inner cylinder 28 made of insulating material, the inner cylinder 28 and the outer cylinder 24 together serve as the housing of the electrode device, and the electrodes 20 are arranged in the inner cylinder 28 with openings on both sides. The left side of the inner cylinder 28 is connected to the insulating sheet 29 , and an air passage 22 is formed between the outer wall of the inner cylinder 28 and the inner wall of the outer cylinder 24 . Other configurations such as electrodes 20, gas channel inlets 21, distribution holes 25, distribution chambers 26, connecting pipes 27 and insulating sheets 29 are the same as those in the first embodiment, and will not be repeated here.
[0064] The advantage of this embodiment is that the electrode 20 is further separated from the gas path 22 by setting the inner cylinder 28 made of electrically insulating material, so a...
no. 3 example
[0066] The difference from the previous two embodiments is that, if Figure 5 as shown, Figure 5 The cross-sectional view shown is located at Figure 4 Middle B-B, in this embodiment, the inner cylinder, outer cylinder and insulating sheet are integrally formed, all of which are insulating materials, and a cylinder with the same diameter as the distribution hole 25 is integrally formed between the inner cylinder 28 and the outer cylinder 24 Shape vent hole, with each vent hole as air path 22. image 3 and Figure 5 Among them, the number of distribution holes 25 is six.
[0067] In this embodiment, a plurality of individual air holes are used as the air passage 22 to make the air flow more stable and uniform.
[0068] Other components in the reaction atmosphere control system of the preferred embodiment of the present invention are introduced below.
[0069] Gas source 11 and gas source 12, such as gas storage devices such as gas cylinders: the stored gas can be an inert...
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