Vacuum debugging process for light cavity of high-power gas laser

Abstract

The invention discloses a vacuum debugging process for a light cavity of a high-power gas laser, which comprises the following steps of: fixing and adjustment of a telescope: cross scale marks in the telescope and mounting ports at two sides of a box body corresponding to the cross scale marks are arranged coaxially; preliminary adjustment of the light cavity: an angle adjusting module is adjusted to enable the cross scale marks of the telescope before and after reflection of each optical lens to be overlapped, and the angle variation of each optical lens is monitored through an optical axis monitoring system; vacuum correction of the light cavity: a laser box body adjusts the corresponding variation generated by each monitoring system in a vacuum condition and the overlap ratio according to the horizontal overlapping condition of the cross scale marks of the telescope, and the laser box body adjusts the angle adjusting modules of a front window lens module under a standard air pressure to enable the images of cross scale marks of the telescope before and after reflection to be overlapped; and online correction of the light cavity: in the light emitting process, all the angle adjusting modules are adjusted according to the angle variation of each monitoring system on a receiving screen to recover the position of a light spot of the optical axis monitoring system before light emission. The vacuum debugging process can realize real-time monitoring and correction.

Description

technical field [0001] The invention belongs to the technical field of optical cavity adjustment of gas lasers, in particular to an optical cavity vacuum adjustment process of high-power gas lasers. Background technique [0002] In the manufacturing process of industrial high-power gas lasers, the adjustment accuracy of the initial optical cavity not only affects the output power of the laser, but also affects the stability of the laser beam direction. Therefore, it is required to achieve high-precision adjustment of the laser optical cavity before emitting light. [0003] At present, the optical cavity adjustment technology of domestic high-power gas lasers has the following problems: First, the optical cavity adjustment uses the red light of a low-power semiconductor laser as the adjustment indicator light, but its spot diameter is large, and high-precision adjustment cannot be achieved ;Secondly, the adjustment of the optical cavity is mostly carried out under standard at...

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Problems solved by technology

[0003] At present, the optical cavity adjustment technology of domestic high-power gas lasers has the following problems: First, the optical cavity adjustment uses the red light of a low-power semiconductor laser as the adjustment indicator light, but its spot diameter is large, and high-precision adjustment cannot be achieved ;Secondly, the adjustment of the optical cavity is mostly carried out under standard atmospheric pressure, while the high-power gas laser works in a vacuum state. Due to the pressure change, the cabinet will be deformed, causing the change of the optical cavity reference and reducing the position accuracy of the optical cavity. ; Third, during the working process of the laser, the optical cavity will be deformed due to external force, which will cause the reduction of position accuracy

Therefore, if the optical cavity has no reference for adjustment, it will not be able to return to its original position during the laser output process, which will not only greatly reduce the quality and energy of the output laser beam, but also make subsequent optical cavity adjustments difficult

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