Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Triaxial integration silicon micro-resonance type accelerometer

A micro-accelerometer, accelerometer technology, applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, acceleration measurement using gyroscope, etc. Installation error and other problems, to achieve the effect of mature design technology, compatible processing technology, and reduced volume

Inactive Publication Date: 2012-11-28
SOUTHEAST UNIV
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for many applications like Miniature Inertial Measurement Unit (MIMU), the measurement of acceleration in three directions (X, Y, Z) in space requires the installation of two or more resonant accelerometers (single-axis or dual-axis), The size, power consumption and weight of this method are relatively large, the cost is high, and there are installation errors, which limit the application and promotion of silicon microresonant accelerometers

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Triaxial integration silicon micro-resonance type accelerometer
  • Triaxial integration silicon micro-resonance type accelerometer
  • Triaxial integration silicon micro-resonance type accelerometer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.

[0015] Such as figure 1 As shown, a three-axis integrated silicon micro-resonant accelerometer includes upper and lower layers; the upper layer is a three-axis integrated silicon micro-resonant accelerometer structure 100, 200 made on a single crystal silicon chip, and the lower layer is made on a single crystal silicon wafer. The signal leads on the glass base 300 , the micro accelerometer structure is bonded on the glass base 300 , and the electrodes on the micro accel...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a triaxial integration silicon micro-resonance type accelerometer which comprises an upper-layer micro-accelerometer structure and a lower-layer glass base, wherein the micro-accelerometer structure is bonded on the glass base which is provided with a signal lead wire; an electrode of the micro-accelerometer structure is connected with the corresponding signal lead wire; and the upper-layer micro-accelerometer structure comprises a full-decoupling biaxial silicon micro-resonance type accelerometer at the left side and a uniaxial silicon micro-resonance type accelerometer at the right side. The accelerometer has simple and compact structure, smaller volume and smaller mechanical coupling and electrical coupling among the intersecting axles and is beneficial to processing and packaging.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems (MEMS) and micro-inertia measurement, and in particular relates to a silicon micro-resonance accelerometer. Background technique [0002] Silicon micro accelerometer is a typical MEMS inertial sensor. It has the characteristics of small size, light weight, low cost, low energy consumption, high reliability, easy digitization, and can meet harsh environment applications. It has important military value and wide application prospect. After nearly 20 years of development, silicon micro-accelerometers at home and abroad have formed a relatively mature theory, and many low-end commercial products have appeared, and their measurement accuracy has reached mg (bias stability) level or above. It can basically meet the requirements of low-precision MIMU system. At present, the research hotspots of silicon micro-accelerometers are mainly concentrated in the directions of high preci...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/18B81B3/00G01P15/14
Inventor 杨波黄丽斌王寿荣李宏生陈卫卫李秀亮
Owner SOUTHEAST UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com