Silicon solar cell and manufacturing method thereof
A silicon solar cell and silicon wafer technology, applied in circuits, electrical components, final product manufacturing, etc., can solve the problems of small photovoltaic power generation and high cost photovoltaic power generation large-scale application, achieve low contact resistance, avoid battery current drop, remove clean effect
Active Publication Date: 2013-01-02
CECEP SOLAR ENERGY TECH
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Problems solved by technology
At present, the proportion of photovoltaic power generation in energy is very small, and the high cost is the main obstacle restricting the large-scale application of photovoltaic power generation
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[0028] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0029] Such as figure 1 As shown, the silicon solar cell of the present invention includes a silicon wafer 1, and the back side of the silicon wafer 1 is provided with a Ti / Pd / Ag electrode 2 to form a back electrode; the front side of the silicon wafer 1 is uniformly provided with two grooves 3 by etching, and N-type silicon 4 , oxide layer 5 and ITO (indium tin oxide) film 6 are sequentially arranged on the front of silicon wafer 1 , and the shapes of N-type silicon 4 , oxide layer 5 and ITO film 6 are all corresponding to silicon wafer 1 . In the two grooves 3, N + Type silicon 7 and Ti / Pd / Ag electrode 8, two Ti / Pd / Ag electrodes 8 form the positive electrode.
[0030] In the above embodiment, the silicon wafer 1 is a P-type radial double-sided polished silicon wafer with a resistivity of 3 Ωcm and a thickness of 320 μm.
[0031] In the above-men...
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Abstract
The invention relates to a silicon solar cell and a manufacturing method thereof. the method comprises the following steps: (1) carrying out wet-type chemical cleaning on a silicon wafer, and drying; (2) carrying out single-side phosphorus source diffusion on the silicon wafer; (3) placing the silicon wafer into an oxide furnace, and forming an oxide layer; (4) carrying out primary photoetching on the frontage of the silicon wafer; (5) removing the oxide layer of the photoetching graphics part of the silicon wafer; (6) carrying out whirl coating protection on the diffusion surface of the silicon wafer, and then corroding the oxide layer at the back surface; (7) carrying out single-side phosphorus source anew partial diffusion on the silicon wafer; (8) removing the oxide layer at the back surface of the silicon wafer; (9) evaporating a Ti / Pd / Ag electrode on the back surface of the silicon wafer, and then annealing; (10) firstly carrying out whirl coating protection on the back surface of the silicon wafer, and removing an optical resist at the back surface of the silicon wafer; (11) evaporating an indium tin film at the frontage of the silicon wafer by utilizing a magnetic control sputtering device; (12) carrying out secondary photoetching on the frontage of the silicon wafer; (13) carrying out tertiary photoetching on the frontage of the silicon wafer; and (14) removing the optical resist at the frontage of the silicon wafer, and annealing. According to the invention, the cell conversion efficiency can be improved effectively; and the cell and method provided by the invention can be widely used in the field of solar cells.
Description
technical field [0001] The invention relates to a solar cell and a preparation method thereof, in particular to a silicon solar cell and a preparation method thereof. Background technique [0002] Energy and environment are two basic issues facing mankind in the 21st century. The development of pollution-free and renewable new energy is the only way to solve these two problems. At present, the proportion of photovoltaic power generation in energy is very small, and the high cost is the main obstacle restricting the large-scale application of photovoltaic power generation. Developing a new generation of high-efficiency, low-cost solar cells that generate electricity at a cost close to or even lower than conventional energy sources has become a top priority. The traditional battery manufacturing process is: cleaning texturing - diffusion - dephosphorization silicon etching - deposition of silicon nitride - silk screen sintering. Since the technological conditions of each pr...
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IPC IPC(8): H01L31/18H01L31/0352H01L31/0224
CPCY02P70/50
Inventor 勾宪芳曹华斌姜利凯王鹏宋爽
Owner CECEP SOLAR ENERGY TECH