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Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof

A technology of laser aiming and mirrors, which is applied in optics, instruments, telescopes, etc., can solve problems such as the inability to accurately obtain spatial information such as the angle of laser incidence, the balance of accuracy and efficiency of target surface sensors, and the inability to optimize laser energy distribution. Achieve the effect of solving multi-target feedback image aliasing, saving aiming time, and solving spot aliasing

Inactive Publication Date: 2013-07-24
INST OF AUTOMATION CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the adjustment time is extended in order to improve the aiming accuracy, and the extended time intensifies the impact of equipment drift on the accuracy, resulting in the entire beam-target coupling process taking care of one and losing the other, forming a vicious circle
[0004] Therefore, in terms of beam-target coupling, it has been difficult for traditional target surface sensors to achieve a balance between accuracy and efficiency.
[0005] In addition, the traditional target surface sensor can only obtain the screen position information of the laser aiming point, but cannot accurately obtain the spatial information such as the incident angle of the laser, and cannot control the distribution of the laser inside the target cavity, and thus cannot realize the laser energy in the target cavity. distribution optimization of

Method used

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  • Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof
  • Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof
  • Moveable reflector laser collimator, moveable reflector target surface sensor and laser collimating method thereof

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no. 1 approach

[0048] The structure and principle of the moving mirror laser aiming device of the present invention will be introduced below.

[0049] figure 2 A schematic structural view of the moving mirror laser aiming device according to the first embodiment of the present invention is shown.

[0050] Such as figure 2 As shown, the moving mirror laser aiming device includes a target O, multiple beams of laser light emitted by multiple lasers are irradiated on the target, and the image acquisition device is used to collect the light incident on it to form an image, and the lens is arranged on Between the target and the image acquisition device, it is used to transmit the image of the target to the image acquisition device. In particular, it also includes a moving mirror, which is arranged between the target and the image acquisition device, and reflects the multiple laser beams emitted by the multiple lasers to the image acquisition device to form a light spot, and the The movable re...

no. 2 approach

[0057] The moving mirror target surface sensor of the present invention is introduced below. image 3 It is a schematic diagram of the three-dimensional structure of the moving mirror target surface sensor of the present invention. Figure 4 It is a structural front view of the moving mirror target surface sensor of the present invention. Figure 5 It is the structure left view of the moving mirror target surface sensor of the present invention.

[0058] Such as image 3 , Figure 4 , Figure 5 As shown, the moving mirror target surface sensor of the present invention includes a first laser aiming device (located on the left side of the figure), a second laser aiming device (located on the right side of the figure), a central visual detection system, a differential focusing system and Moving mirror servo drive system. Wherein, the first laser aiming device and the second laser aiming device both adopt laser aiming devices with the same structure, and are arranged symmetri...

no. 3 approach

[0090] The working principle of the moving mirror laser aiming device of the present invention is introduced below.

[0091]

[0092] Figure 8 It is a schematic diagram of the relationship between the movement of the moving mirror and the trajectory of the reflected laser spot.

[0093] like Figure 8 As shown, the laser is incident from point ①, reflected by the mirror, and imaged on the CCD, and the imaging result on the CCD is displayed in the form of a plan view above the CCD. When the reflector moves in the direction of the vertical arrow (that is, toward the CCD), its imaging point on the CCD moves in the direction of the horizontal arrow (on the CCD image sensitive surface). Specifically, when the reflector is in the conjugate position, the incident laser light is reflected at point ②, and forms a spot on point ② on the CCD image sensitive surface; when the reflector moves to position I in the direction of the CCD, the incident laser light is reflected at point ③ ...

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Abstract

The invention relates to a moveable reflector laser collimator, a moveable reflector target surface sensor and a laser collimating method thereof. The moveable reflector laser collimator comprises an image acquisition device, a moveable reflector and a lens, wherein the image acquisition device is used for acquiring incident rays to form an image; the moveable reflector is used for reflecting thelaser onto the image acquisition device to form a light spot; the lens is used for transmitting a target to the image acquisition device; and the moveable reflector can move linearly relative to the image acquisition device. By providing a moveable reflector system, the small-range high-precision translation of the moveable reflector is implemented, so that the target can be quickly and accurately collimated by the laser, thereby solving the phenomenon of light spot aliasing, saving the collimating time and enhancing the targeting precision.

Description

technical field [0001] The invention relates to a device for aiming multiple laser beams, in particular to a moving reflector laser aiming device, a moving reflector target surface sensor and a laser aiming method thereof. Background technique [0002] The technology of guiding multiple laser beams for precise aiming can be applied to the high-end manufacturing and inspection industry, and can also be used in other special applications where multiple laser beams are guided to aim at tiny targets. In the above-mentioned applications, it is necessary to use a dedicated laser aiming device to guide hundreds of laser beams into the designated target area of ​​several millimeters at the same time, and then ablate the target with hundreds of laser beams. Usually, the process of directing the laser to aim at the target is simply referred to as the beam-target coupling process, and the special sensor formed by this laser aiming device for guiding multiple laser beams to aim at the t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B23/12G02B26/08
Inventor 吴保林张文生史亚莉郝银星李海鹏董秋雷王颢星张正涛
Owner INST OF AUTOMATION CHINESE ACAD OF SCI
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