One-sided silicon wafer wet etching equipment
A technology for wet etching and silicon wafers, which is applied in the field of bulk silicon processing, can solve problems such as the inability to effectively protect silicon wafers, and achieve the effect of maintaining stable corrosion rate and uniformity
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[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0024] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings in combination with one-side deep silicon wet etching as a specific example.
[0025] like figure 1 as shown, figure 1 Schematic diagram of the overall structure of the single-side silicon wafer wet etching equipment provided by the present invention, the equipment includes a liquid supply device 1, an etching chamber 2 and a residual liquid treatment device 3, wherein the liquid supply device 1 sprays a high-temperature alkaline etching solution to the On the silicon wafer rotating on the vacuum chuck in the et...
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