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Support elements for optical element

A technology of optical components and support units, applied in the positioning of support units, the priority field of the US provisional patent application, can solve the problems of low acceleration, decreased positioning accuracy, distortion of the optical axis direction, etc., and achieve small stress and long service life Effect

Active Publication Date: 2011-10-26
CARL ZEISS SMT GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This has the consequence that, first of all, the optics manipulator has a limited lifespan or only relatively low accelerations are permitted, so that (for a certain adjustment range) only small adjustment movements are possible
This is very disadvantageous considering the continuing trend of increasing travel for greater adjustment range
[0010] Another disadvantage of this configuration is that in the area of ​​the ball joint, possible tilting movements can lead to distortions in the position of the joint points assigned to the optics in the direction of the optical axis, thereby resulting in reduced positioning accuracy

Method used

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  • Support elements for optical element
  • Support elements for optical element
  • Support elements for optical element

Examples

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no. 1 example

[0043] reference below Figures 1 to 8 A preferred embodiment of an optical support element according to the invention is described, which is used in an optical module according to the invention of an optical imaging device according to the invention for microlithography. In this case, to simplify this description, an xyz coordinate system is introduced, where the z direction indicates the vertical direction. However, it goes without saying that any spatial orientation of the components of the imaging device can be provided with a corresponding modification of the invention.

[0044] figure 1 A schematic diagram is shown of a preferred embodiment of an optical imaging device according to the invention in the form of a microlithographic device 101 operating with UV light having a wavelength of 193 nm.

[0045] The optical elements in the optical element group are in this example refractive optical elements, eg in the form of lenses, prisms, plates or the like. It goes withou...

no. 2 example

[0093] In the following, refer to figure 1 , 2 and 9A describe another preferred embodiment of the support element 211 according to the invention. The supporting element 211 can be used to replace the supporting element 111 in the imaging device 101 . The basic structure of the support element 211 and its method of operation correspond to figure 2 The support element 111 in , so only the differences will be described here. In particular, the reference numerals of similar parts are increased by 100. Unless otherwise stated below, the description related to the characteristics of the components refers to the description given above.

[0094] Figure 9A A cross-section in the region of the support member 214 is shown in . The only difference between the support element 211 and the support element 111 is that the first flexures 214.2 and 214.4 of the support element 214 are configured as leaf spring elements extending transversely to the x-direction. In this way, too, a li...

no. 3 example

[0101] In the following, refer to figure 1 , 2 and 10A describe another preferred embodiment of a support element 311 according to the invention. The supporting element 311 can be used to replace the supporting element 111 in the imaging device 101 . The basic structure of the support element 311 and its method of operation correspond to figure 2 The support element 111 in , so only the differences will be described. In particular, the reference numerals of similar parts are increased by 200. Unless otherwise stated below, the description related to the characteristics of the components refers to the description given above.

[0102] Figure 10A A cross-section in the region of the support member 314 is shown. The only difference between the support element 311 and the support element 111 is that the first flexure 314.1 of the support element 314 is configured as a leaf spring element (extending in the x-direction), while a flexure similar to the flexure 114.3 is omitte...

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Abstract

The present invention relates to a support element for an optical element, in particular for microlithography, comprising a support member, a first connection element for connecting the support member to an external support unit and a second connection element for connecting the support member to the optical element. The support element is adapted to cooperate with further support elements in a parallel kinematic fashion for positioning and orienting the optical element relative to the external support unit in six degrees of freedom. The support member comprises a plurality of first bending joints, with the first connection element and / or the second connection element comprising at least a second bending joint, wherein each of the first and second bending joints defines a bending axis. A motion limitation of the optical element relative to the support unit can be accomplished in at most two degrees of freedom by way of the plurality of first and second bending joints. Each of the first and second bending joints is designed in elongated fashion along the bending axis.

Description

Background technique [0001] This application claims priority to US Provisional Patent Application No. 61 / 114,540, filed November 14, 2008, as defined in 35 U.S.C. 119(e)(1). Priority is also claimed from German patent application filed in 2008 with official number 102008049746.0. [0002] The content of US Provisional Patent Application No. 61 / 114,540 and German Patent Application Official No. 102008049746.0 are each part of the present application and are hereby incorporated by reference. [0003] This application includes reference documents which are incorporated by reference and constitute part of this application. In the event of an inconsistency between the direct disclosure of the present application and the disclosure of a reference incorporated by reference, the disclosure of the present application takes precedence. [0004] The invention relates to a support element for an optical element and a method of supporting the optical element. The present invention may b...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/00G03F7/20
CPCG03F7/70825G02B7/02G02B7/003G03F7/7015
Inventor 詹斯.库格勒乌尔里克.韦伯尼古莱.温格特
Owner CARL ZEISS SMT GMBH