Hydroelectric end connecting device for rotating target

Abstract

The invention relates to a hydroelectric end connecting device for a rotating target; and the hydroelectric end connecting device for the rotating target comprises a seat core and is characterized in that a water pipe and an electric-conductive rod are respectively mounted on the seat core and the seat core is connected with a shell module. Moreover, a shaft retainer ring is arranged at one end of the shell module; and a sealing cover is arranged at the other end of the shell module. A framework type oil seal module is arranged at the tail end of the shaft retainer ring. Meanwhile, an electric-conductive rod head is sleeved on the periphery of the framework type oil seal module. Therefore, while a target material is replaced, the assembling and disassembling steps can be effectively reduced. More importantly, the shaft retainer ring is mutually matched with a base closing piece so that the rotation force of the driving can be effectively transmitted to facilitate the smooth working ofthe target material.

Description

technical field [0001] The invention relates to a terminal connection device, in particular to a hydroelectric terminal connection device for a rotating target. Background technique [0002] At present, most of the equipment for producing coated glass adopts planar sputtering cathode target. Its working principle is: the glass to be coated is sent into the vacuum coating chamber, and a certain amount of high-purity process gas such as oxygen, nitrogen or Argon gas, under the action of electromagnetic field and free electrons, the process gas forms positively charged plasma. Under the attraction of the cathode carrying high negative voltage, the plasma bombards the fixed installation according to a certain trajectory and intensity under the control of the magnetic field. The coating material on the planar cathode target in the vacuum coating chamber is collided by gas molecules and deposited on the glass in a certain direction to form a film with a certain thickness. [0003...

AI Technical Summary

Problems solved by technology

[0003] However, the existing hydropower terminal has a complex structure, cannot adapt to the replacement needs of different targets, and cannot perform effective rotation adjustments

In this way, once the target is replaced, the connection is prone to instability, which affects the later maintenance and the coating quality of the product.

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