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Vacuum transmission process equipment and method

A technology of vacuum transmission and process equipment, which is applied in the direction of conveyor objects, transportation and packaging, and final product manufacturing. It can solve the problems of low production efficiency and achieve the effects of reducing processing costs, simple and reliable design, and high production efficiency.

Active Publication Date: 2012-01-11
KINGSTONE SEMICONDUCTOR LIMITED COMPANY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a vacuum transmission process equipment and method with high production efficiency and low cost in order to overcome the defect of low production efficiency of the vacuum process method in the prior art

Method used

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  • Vacuum transmission process equipment and method
  • Vacuum transmission process equipment and method
  • Vacuum transmission process equipment and method

Examples

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Embodiment 1

[0041] figure 1 Shown is a side view of an embodiment of the vacuum transfer process tool of the present invention. In order to process the workpiece to be processed in a vacuum environment, the vacuum transmission process equipment first includes a vacuum process chamber 1, and a processing device 2 is arranged in the vacuum process chamber 1, and the processing device 2 has an effective processing range during operation, In this paper, the effective processing range is referred to as the processing area (such as figure 1 As shown by the dotted line box in ), only the workpieces transported through the processing area can be effectively processed by the processing device 2 . The processing device 2 can be various types of workpiece processing devices, but is preferably a non-contact workpiece processing device, such as: a device that uses ion beams or plasma to process workpieces, a device that heats workpieces or Devices for annealing workpieces, etc.

[0042] In addition...

Embodiment 2

[0070] The vacuum transmission process equipment in Embodiment 1 is aimed at the situation that the workpiece can be processed with high quality only by passing through the processing area once, and when the processing time required for each workpiece is long, Embodiment 2 can also be used The way in which to complete the processing of the workpiece.

[0071] The only difference between the vacuum transmission process equipment in this embodiment and the vacuum transmission process equipment in Embodiment 1 is that it omits the shifting device in Embodiment 1, although each transmission platform still moves between each other They are not in the same plane, but each transfer platform can ensure that all the workpieces carried on it pass through the processing area during the process of moving in and out of the vacuum process chamber, while the structure and operation mode of the rest of the components are different. Exactly the same as Example 1. In this embodiment, correspon...

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Abstract

The invention discloses vacuum transmission process equipment, which comprises at least two workpiece inlet cavities connected with one end of a vacuum process cavity, at least two transmission platforms corresponding to the workpiece inlet cavities one to one, and a shifting device, wherein moving planes of the transmission platforms are different; the shifting device is used for making the transmission platforms and a processing area relative shift in a direction vertical to the moving directions of the transmission platforms; when each transmission platform moves from a workpiece inlet cavity to the vacuum process cavity, workpieces on one side of the transmission platform pass the processing area and are processed, and when the transmission platform moves from the vacuum process cavity to the workpiece inlet cavity, workpieces on the other side of the transmission platform pass the processing area and are processed. The invention also discloses a vacuum transmission process methodimplemented by the vacuum transmission process equipment, another vacuum transmission process equipment and another vacuum transmission process method. By the invention, workpieces in various batchescan be continuously processed, so that the most ideal high production efficiency is achieved.

Description

technical field [0001] The invention relates to the field of vacuum process, in particular to a vacuum transmission process equipment and method. Background technique [0002] In various more precise manufacturing industries, many machining processes for workpieces need to be carried out in a vacuum environment, so how to improve the production efficiency of the vacuum process has become a crucial research topic. [0003] There are various vacuum process methods in the prior art, some of which have high production efficiency. For example, U.S. Patent 20080038908 discloses a more efficient vacuum process method, but based on its design principle, the production efficiency of this method is still subject to some natural limitations, such as, when different batches of workpieces enter and exit the vacuum environment, Or when switching from processed workpieces to the next batch of workpieces to be processed in a vacuum environment, the processing process of the workpieces by t...

Claims

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Application Information

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IPC IPC(8): B65G47/74H01L31/18
CPCY02P70/50
Inventor 陈炯洪俊华钱锋
Owner KINGSTONE SEMICONDUCTOR LIMITED COMPANY