The application discloses a
quantum sensor
chip packaging structure capable of realizing
wafer-level planar co-packaging, which comprises a microfabricated atomic
cell, a
light source chip assembly and a
light detection chip assembly, the microfabricated atomic
cell is integrated with a reflecting element, the reflecting element is used for adjusting the
optical path of the
light beam entering the microfabricated atomic
cell, the microfabricated atomic cell, the
light source chip
assembly and the
light detection chip assembly are supported on a packaging substrate through a micro-bump assembly and are directly electrically interconnected with the packaging substrate through the micro-bump assembly, the micro-bump assembly comprises a plurality of micro-bumps, the distribution mode of the micro-bumps is for the purpose of realizing the supporting function and the electrical
interconnection, the size of the micro-bump supporting the microfabricated atomic cell, the
light source chip assembly and / or the
light detection chip assembly is adjustable, the
optical path of the microfabricated atomic cell is regulated by adopting the combination of micro-bumps with different sizes, and the planar co-packaging of the microfabricated atomic cell and other key
quantum sensor components can be realized.