Pulse laser cutting method for fragile materials

Abstract

The invention discloses a pulse laser cutting method for fragile materials, which utilizes a device comprising a pulse laser with a pulse width of millisecond level, a computer, an electric horizontal moving platform and the like to cut a fragile plate-like material. By utilizing the characteristics that linearly polarized laser can form long and narrow ablated areas on the surface of the material and that the fragile material can be easily broken, the pulse laser cutting method forms uncrossed long and narrow ablated areas distributed at intervals on the surface of the fragile plate-like material along the scanning direction, then utilizes the stress of both ends of each ablated area to break the material, and connects the neighboring ablated areas together, and thereby cutting is finished. Since the pulse laser cutting method adopts the long and narrow ablated areas formed by the linearly polarized laser, the waste of the material can be reduced, the ablated areas are cut when the material is broken, fracture surfaces are smooth, and the cutting quality is high; the ablated areas are distributed at intervals, and do not need to be crossed by one another, the needed laser energy is little, the cutting speed is high, and the pulse laser cutting method can be widely applied to the cutting of glass, ceramics, semiconductors and other fragile plate-like materials.

Description

technical field [0001] The invention relates to a laser cutting method, in particular to a method for completing fracture cutting of plate-shaped brittle materials according to the thermal stress induced in the process of linearly polarized laser irradiating brittle materials. Background technique [0002] Most of the existing laser cutting technologies for brittle materials use continuous lasers to scan the surface of brittle plate-shaped materials along a straight line, and use the high-density energy generated by the laser beam to be focused by the lens to melt or even gasify the material in a short time, and then The slag is blown off with auxiliary gas blowing, and then the kerf is completed by moving the laser beam to form a continuous ablation area. This type of laser cutting method mostly uses circularly polarized laser to form a continuous ablation area to fuse the material. The laser energy required in the process is large, and there are disadvantages such as slow ...

AI Technical Summary

Problems solved by technology

However, the above article only analyzes metal materials, and the completion of cutting metal materials under the condition of linearly polarized laser scanning still requires high-energy lasers to form continuous ablation areas on the material surface

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