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Method for quickly and automatically adjusting tested element detected by using Fizeau interferometer

A Fizeau interferometer and automatic adjustment technology, applied in the field of measurement, can solve the problems of limiting the accuracy of optical detection and high technical requirements of operators, and achieve the effect of improving the speed and accuracy of interpretation, good dynamic characteristics, and realizing real-time interpretation.

Inactive Publication Date: 2012-01-18
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

On the one hand, the above-mentioned method requires the operator to have certain knowledge of interference inspection and adjustment operation experience, which has high technical requirements for the operator, and requires repeated manual adjustments to obtain better inspection results; on the other hand, due to manual Interpretation of interference fringes, different operators often have different interpretation results, thus improving the repeatability of optical detection using Fizeau interferometer, that is, limiting the accuracy of optical detection

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  • Method for quickly and automatically adjusting tested element detected by using Fizeau interferometer
  • Method for quickly and automatically adjusting tested element detected by using Fizeau interferometer
  • Method for quickly and automatically adjusting tested element detected by using Fizeau interferometer

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Embodiment Construction

[0015] Such as figure 1 As shown, the automatic adjustment system of the Fizeau interferometer measured component used in the method of the present invention includes a pitching and tilting direction adjusting device 3, a vertical and horizontal direction adjusting device 4, an object stage 5 and a precision linear guide rail 6; the pitching and tilting direction The adjustment device 3 and the vertical and horizontal direction adjustment device 4 are fixedly installed on the object stage 5; the object stage 5 performs linear motion on the precision linear guide rail 6.

[0016] The pitching and tilting direction adjusting device 3 fixes the measured element 2 through a mechanical fixture.

[0017] Such as figure 2 As shown, the present invention uses a Fizeau interferometer to detect a method for fast and automatic adjustment of the measured element, comprising the following steps:

[0018] 1) Install the tested component 2, move the tested component 2 to the designated te...

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Abstract

The invention discloses a method for quickly and automatically adjusting a tested element detected by using a Fizeau interferometer, belonging to the technical field of measurement. The detection method comprises the following steps of: mounting a device, interpreting fringes and detecting whether the tested element meets the requirement; if the tested element does meet the requirement, driving an adjusting device; and finally adjusting until interference fringes are ideal fringes and the number of the interference fringes is proper and ending program. According to the method disclosed by theinvention, the quick and high-precision posture and position adjustment for the tested element can be realized, the adjusting efficiency is improved and the influence on the measurement result of theFizeau interferometer caused by manual interpretation is reduced, that is to say, the repetitiveness of the measurement result of the Fizeau interferometer is further improved.

Description

technical field [0001] The invention belongs to the technical field of measurement, and relates to a method for quickly and automatically adjusting a measured component by using a Fizeau interferometer. Background technique [0002] The precision and repeatability of optical detection directly affect the technical level of the processing of optical components and the manufacture of optical systems. Require. [0003] Fizeau interferometer is widely used in surface shape detection of optical components, curvature radius detection and optical system transmission wavefront detection, etc. It is an important equipment in optical detection. The general detection process is to manually adjust the posture and position of the tested component after installing the tested component, and repeatedly adjust it by observing the interference image on the display until the ideal interference fringe image appears, and then perform correlation through the Fizeau interferometer. detection, an...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01M11/02
Inventor 代雷隋永新杨怀江王高文王飞
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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