Light modulator pixel unit and manufacturing method thereof

A pixel unit and light modulator technology, applied in optical components, instruments, optics, etc., can solve the problem of reducing the cost of the pixel unit of the light modulator, and achieve the effect of cost reduction
CN102360119BActive Publication Date: 2014-12-31XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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Patent Information

Authority / Receiving Office
CN ยท China
Patent Type
Patents(China)
Current Assignee / Owner
XIAN YISHEN OPTOELECTRONICS TECH CO LTD
Publication Date
2014-12-31

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Abstract

An embodiment of the invention provides a light modulator pixel unit and a manufacturing method thereof. The light modulator pixel unit comprises that: an interlayer dielectric layer positioned on a substrate; a cavity in the interlayer dielectric layer; a bottom electrode, a movable electrode and a top electrode which are in the interlayer dielectric layer and have positions corresponding to the position of the cavity; an optical filter which is on the top electrode and is used for converting white light into three-primary-color light. The movable electrode has a light reflecting surface, and the top electrode is a semi-transparent metal film. By utilizing movement of the movable electrode in the cavity, a light modulator can carry out modulation on the three-primary-color light after conversion by the optical filter. The embodiment of the invention solves a problem that a present light modulator pixel unit generally needs to utilize monochromatic light emitted by a monochromatic light source as incident light, and cost of the light modulator pixel unit is reduced.
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Description

technical field

[0001] The invention relates to a light modulator, in particular to a light modulator pixel unit applied to a flat panel display system and a manufacturing method thereof. Background technique

[0002] In a projection system, the key building block is the light modulator. Existing optical modulators include micro-electro-mechanical components (Micro-Electro-Mechanical Systems, MEMS), and the optical modulator controls the movement of the micro-electro-mechanical components by controlling electrical signals applied to the The movement modulates the light incident on the light modulator to output light with a certain gray scale.

[0003] Generally, a light modulator includes a plurality of pixel units arranged in a matrix. There are two types of existing light modulator pixel units: a digital mirror device (digital mirror device, DMD) that uses the principle of light reflection and a digital mirror device that uses the principle of light diffraction. Grating ...

Claims

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