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Light modulator pixel unit and manufacturing method thereof

A pixel unit and light modulator technology, applied in optical components, instruments, optics, etc., can solve the problem of reducing the cost of the pixel unit of the light modulator, and achieve the effect of cost reduction

Active Publication Date: 2014-12-31
XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The problem solved by the embodiments of the present invention is to provide a light modulator pixel unit, a MEMS light modulator and a manufacturing method thereof, which solves the problem that the existing light modulator pixel unit generally needs to use monochromatic light emitted by a monochromatic light source as the incident light. light issues, reducing the cost of the light modulator pixel unit

Method used

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  • Light modulator pixel unit and manufacturing method thereof
  • Light modulator pixel unit and manufacturing method thereof
  • Light modulator pixel unit and manufacturing method thereof

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Embodiment Construction

[0052] The inventors found that because the light modulators in the prior art usually modulate the monochromatic light emitted by the monochromatic light source, this makes the existing light modulators unable to be applied to the white light source. For example, when the existing light modulator is applied to a micro-display system (such as a mobile phone or an e-book), there may be a problem that the display of the display screen is poor or cannot be displayed under sunlight during the day. In order to solve the above problems, the inventor proposes a light modulation pixel unit, which uses the light interference principle to modulate white light. The light modulator pixel unit is mainly used in flat panel display systems and micro display systems.

[0053] The device structure of the pixel unit of the light modulator of the present invention will be described below.

[0054] Please refer to figure 2 , figure 2 is a schematic structural diagram of a pixel unit of a light m...

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Abstract

An embodiment of the invention provides a light modulator pixel unit and a manufacturing method thereof. The light modulator pixel unit comprises that: an interlayer dielectric layer positioned on a substrate; a cavity in the interlayer dielectric layer; a bottom electrode, a movable electrode and a top electrode which are in the interlayer dielectric layer and have positions corresponding to the position of the cavity; an optical filter which is on the top electrode and is used for converting white light into three-primary-color light. The movable electrode has a light reflecting surface, and the top electrode is a semi-transparent metal film. By utilizing movement of the movable electrode in the cavity, a light modulator can carry out modulation on the three-primary-color light after conversion by the optical filter. The embodiment of the invention solves a problem that a present light modulator pixel unit generally needs to utilize monochromatic light emitted by a monochromatic light source as incident light, and cost of the light modulator pixel unit is reduced.

Description

technical field [0001] The invention relates to a light modulator, in particular to a light modulator pixel unit applied to a flat panel display system and a manufacturing method thereof. Background technique [0002] In a projection system, the key building block is the light modulator. Existing optical modulators include micro-electro-mechanical components (Micro-Electro-Mechanical Systems, MEMS), and the optical modulator controls the movement of the micro-electro-mechanical components by controlling electrical signals applied to the The movement modulates the light incident on the light modulator to output light with a certain gray scale. [0003] Generally, a light modulator includes a plurality of pixel units arranged in a matrix. There are two types of existing light modulator pixel units: a digital mirror device (digital mirror device, DMD) that uses the principle of light reflection and a digital mirror device that uses the principle of light diffraction. Grating ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/00B81C1/00
Inventor 毛剑宏唐德明
Owner XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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