Digital micro-mirror device and forming method thereof
A digital micromirror device and device technology, applied in the field of projectors, can solve problems such as high driving voltage, complex structure, and low yield, and achieve the effects of reducing driving voltage, improving sensitivity, and simple structure
Active Publication Date: 2014-05-21
XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
[0005] The problem solved by the present invention is that the structure of the digital micromirror device in the prior art is complex, the yield is low, and the driving voltage is high (high power consumption)
Method used
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[0084] figure 2 It is a schematic diagram of a three-dimensional structure of a digital micromirror device according to a specific embodiment of the present invention, Figure 21a for figure 2 The schematic diagram of the cross-sectional structure of the digital micromirror device shown along the a-a direction, Figure 21b for figure 2 The schematic diagram of the cross-sectional structure of the digital micromirror device shown along the b-b direction, where the a-a direction is perpendicular to the b-b direction, combined with reference figure 2 and Figure 21a , Figure 21b , the digital micromirror device of the present invention includes: a substrate 30, a micromirror device control circuit structure 31 is formed on the substrate 30; a digital micromirror array located on the substrate 30, each digital micromirror array The micromirror comprises a mirror 36, two first pole plates 35, and two second pole plates 33; the two second pole plates 33 are located on the ...
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The invention discloses a digital micro-mirror device and a forming method thereof. The digital micro-mirror device comprises a base provided with a control circuit structure for the micro-mirror device, a digital micro-mirror array and two bayonets. wherein each digital micro-mirror comprise a reflector, two first pole plates and two second pole plates; and the two bayonets are oppositely arranged, and the bayonets are fixed and electrically connected with the control circuit for the micro-mirror device; two opposite side edges of the reflector are movably arranged in the bayonets, such that when the reflector is in contact with the bayonets, the bayonets and the reflector are electrically connected; and in case of voltage difference between the first pole plates and the second pole plates, the reflector, driven by the first pole plates, deflects about the corresponding second pole plates. The digital micro-mirror device according to the technical scheme has a simple structure, and as the two opposite side edges of the reflector is movably arranged in the bayonets, the sensitivity of the digital micro-mirror device can be improved.
Description
technical field [0001] The invention relates to the technical field of projectors, in particular to a digital micromirror device and a forming method thereof. Background technique [0002] DMD (digital mirror device) digital micromirror device is an integrated MEMS superstructure cell, which is made of CMOS SRAM memory cells. The manufacture of the upper structure of the DMD starts from the complete CMOS memory circuit, and then through the use of the mask layer, the upper structure of the aluminum conductive layer and the hardened photoresist layer (hardened photoresist) are manufactured alternately. The aluminum conductive layer includes the address electrode (address) Electrode), hinge (hinge), yoke (yoke) and mirrors, hardened photoresist layer is used as a sacrificial layer (sacrificial layer), used to form air gaps (air gaps). The aluminum conductive layer is sputter-deposited and plasma-etched to form address electrodes, hinges, yokes and mirrors; the sacrificial lay...
Claims
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IPC IPC(8): G02B26/08B81C1/00
Inventor 毛剑宏唐德明
Owner XIAN YISHEN OPTOELECTRONICS TECH CO LTD