Organic micro-molecule thermal evaporating crucible assembly

A technology of thermal evaporation and small molecules, which is applied in the field of vacuum thermal evaporation process equipment, can solve the problems of poor uniformity of organic thin films, and achieve the effect of solving the problem of poor uniformity

Inactive Publication Date: 2012-03-28
SHANGHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a small organic molecule thermal evaporation crucible assembly, which is used to solve the problem of poor uniformity of organic thin films caused by the shape of the crucible in the prior art

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  • Organic micro-molecule thermal evaporating crucible assembly
  • Organic micro-molecule thermal evaporating crucible assembly
  • Organic micro-molecule thermal evaporating crucible assembly

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Embodiment Construction

[0023] The implementation of the present invention will be illustrated by specific specific examples below, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0024] see figure 1 to Figure 3. It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for those who are familiar with this technology to understand and read, and are not used to limit the implementation of the present invention. Limiting conditions, so there is no technical substantive meaning, any modification of structure, change of proportional relationship or adjustment of size, without affecting the effect and purpose of the present invention, should still fall within the scope of the present invention. The disclosed technical content must be within the scope covered. At the same...

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Abstract

The invention provides an organic micro-molecule thermal evaporating crucible assembly. The crucible assembly comprises a crucible body (100) and three layers of cover plates. The three layers of cover plates comprise a bottom cover plate (101) arranged at the port of the crucible, a middle cover plate (102) arranged on the bottom cover plate, and a top cover plate (103) arranged on the middle cover plate. The bottom cover plate is provided with a plurality of through holes (1011). The middle cover plate is provided with at least one micro-chamber (1021). The top cover plate is provided with at least one material discharging hole (1031). The material discharging hole (1031) and the through holes (1011) all communicate with the micro-chamber (1021). The projections of the material discharging hole (1031) and the through holes (1011) on a same water level are not overlapped. With the organic micro-molecule thermal evaporating crucible assembly provided by the invention, a problem in existing technologies of degraded organic film uniformity caused by the shape of crucibles is effectively solved.

Description

technical field [0001] The invention relates to a vacuum thermal evaporation process equipment, in particular to an organic small molecule thermal evaporation crucible assembly. Background technique [0002] Organic semiconductor technology has become a current research and development hotspot due to its low cost, flexibility, and easy large-area film formation. Based on organic semiconductor materials, organic light-emitting, organic solar energy, organic thin-film transistors, organic lasers, organic storage, organic sensors, etc. In recent years are in rapid development. There are two types of organic semiconductor materials, small molecules and polymers. Organic small molecule devices are generally prepared by vacuum thermal evaporation technology, while polymer devices are generally prepared by solution methods. Due to the relatively mature technology, organic small molecule devices based on vacuum thermal evaporation technology It has developed relatively fast in rece...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
Inventor 曹进容佳玲王立张建华
Owner SHANGHAI UNIV
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