Three-dimensional multi-directional pressure switch applied to medical intervention and supported by annular spring
A technology of pressure switches and ring springs, applied in the direction of electric switches, electrical components, circuits, etc., can solve problems such as no design solutions
Inactive Publication Date: 2014-01-15
SHANGHAI JIAOTONG UNIV
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Problems solved by technology
However, if the endoscope can achieve the purpose of automatic intervention, it must be controlled with a multi-directional sensitive pressure switch to ensure that the endoscope can automatically change its direction and successfully intervene in the cavity when it intervenes. However, the current multi-directional sensitive The pressure switch does not have a mature design
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Embodiment 3
[0021] Example three-dimensional omnidirectional sensitive miniature pressure sensor
[0022] Such as figure 1 As shown, the three-dimensional omnidirectional sensitive pressure sensor of this embodiment includes: a substrate 1, a movable electrode (including an annular movable electrode 2 and a horizontal beam 3), a fixed electrode (including a part 4 parallel to the base and a part 5 perpendicular to the base) , horizontal spring 6, spring support seat 7. There are four pairs of fixed electrodes on the base, of which the part 4 parallel to the base is located directly below the movable electrode 2 , and the part 5 perpendicular to the base is located inside the movable electrode 2 . The spring support seat 7 is also on the base 1 and is located at the center of the base 1 . The annular movable electrode 2 is connected by eight sets of horizontal springs 6 and is suspended above the base 1 by the spring support seat 7 . The horizontal beam 3 is located inside the annular m...
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The invention provides a three-dimensional multi-directional pressure switch applied to medical intervention and supported by an annular spring. In the invention, a movable electrode comprises two parts including an annular movable electrode and a horizontal beam; the annular movable electrode is connected with an annular horizontal spring and is suspended above a base through a spring support seat; a fixed electrode is L-shaped, one part of the L shape is parallel to the base and the other part of the L shape is vertical to the base, wherein the fixed electrode is parallel to the base part and a vertical gap is formed between the fixed electrode and the annular movable electrode; and the fixed electrode is vertical to the base part and a horizontal gap is formed between the fixed electrode and the annular movable electrode. In the invention, by constructing the movable electrode and the fixed electrode which are supported by the spring, only one micro-switching device can be used for simultaneously detecting micro-contact pressure effects from a plurality of directions. By using a plurality of loops of the annular springs as movable structures, compared with that S-shaped springs, the three-dimensional multi-directional pressure switch provided by the invention has the advantages of reducing the difference between the rigidity of a spring structure in the horizontal direction and the rigidity of the spring structure in the vertical direction, and improving the consistency of sensing three-dimensional multi-directional outer forces by the whole device in all the directions.
Description
technical field [0001] The invention relates to a micro switch, in particular to a three-dimensional multi-directional pressure switch supported by an annular spring applied to medical intervention. It belongs to the technical field of microelectromechanical systems. Background technique [0002] Micro-contact sensors designed and manufactured based on MEMS technology have attracted much attention because of their advantages of small size, low cost and mass production. In the past, micro-mechanical switches, because the processing method was based on micro-electro-mechanical system technology, in many cases, the preparation of the switch was based on silicon etching or electroplating, and the SOI (Silicon on Insulator) silicon wafer was dry-etched to obtain a floating The structure can move horizontally, and use the etched side wall slope to realize the switching function of the switch, which is a micromechanical switch driven by horizontal pressure; and through the electro...
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IPC IPC(8): H01H13/26
Inventor 杨卓青黄韬丁桂甫赵小林
Owner SHANGHAI JIAOTONG UNIV