Light-splitting spectrum type measurement system
A spectroscopic and measurement technology, which is applied in the field of measurement systems, can solve the problems of reducing the reliability of precise detection and affecting the uniformity of detection precision.
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[0028] The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of preferred embodiments with accompanying drawings.
[0029] see Figure 4 Shown in the first preferred embodiment of this case, the internal structure of the spectrometer includes a spectroscopic device 4, an array light detection device 5, and a response flattening filter device 6, wherein the spectroscopic device 4 further includes a slit 41, a collimating mirror 42. The light-splitting diffraction element 43 and the focusing mirror 44, and the incident light of different wavelength components incident on the sample to be measured is passed through the slit 41 in the light-splitting device 4 to filter the stray light in space, allowing only narrow range of beam incidence. In this example, a response flattening filter device 6 is set at the light incident position immediately, and the material of the response flatt...
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