An Erosion Cleaner for Large Diameter Single Crystal Dislocations

Abstract

The invention discloses an etching- cleaning machine for a large-diameter single crystal dislocation, comprising an acid storage tank and a cleaning machine tank, wherein a washing tank for etching or cleaning silicon ingots, silicon blocks, and silicon rods is arranged in the cleaning machine tank, the upper panel position of the tank is provided with a safety protection door, the upper portion of the tank is connected with an exhaust system. The etching- cleaning machine further comprises a liquid pipe portion and a vapor gun portion, the bottom of the whole machine is provided with a liquid-collecting plate, and the bottom of the machine is provided with movable truckles. According to the invention, a basket filled with silicon ingots is put in a pickling tank (washing tank) by a mobile trolley having a lifting function, corresponding pumps and valves are controlled through point contact button switches to complete the cleaning and etching of the silicon ingots, silicon blocks, and silicon rods. By etching the whole dislocation of the large-diameter single crystal, sampling or relicate sampling is avoided, and a slip portion and a no-slip portion cane be accurately divided. The structure of the acid storage tank can allow acids to be used repeatedly, and the application amount and discharge capacity of the acids are reduced.

Description

technical field [0001] The invention relates to a device for acid etching and cleaning silicon ingots, silicon blocks and silicon rods, especially a device for large-diameter single crystal dislocation corrosion cleaning. Background technique [0002] With the increasing production of large-diameter single crystals, the requirements of customers are becoming more and more stringent, and now basically require slip-free single crystals. The original test method is to intercept the sample at the isodiametric position of the single crystal for slip detection. If slippage is detected, additional sampling is required, and the sampling length can only be estimated empirically. In order to more accurately divide the slip and non-slip parts, it is necessary to soak the whole single crystal in the prepared acid etching solution. In consideration of human safety, when corroding the sample piece, the acid after etching the sample piece must be discharged into the acid tank, and the di...

AI Technical Summary

Problems solved by technology

In consideration of human safety, when corroding the sample piece, the acid after etching the sample piece must be discharged into the acid tank, and the discharged acid cannot be reused. If the entire single crystal is etched according to the previous method, the single crystal The crystal is too heavy (taking Φ360mm L: 200mm single crystal as an example, the weight is about W: 48Kg, there are Φ400mm, L: 380mm single crystal in actual production), if it is carried by people alone, not only the single crystal has the problem of bumping, but also the most It is important that human safety cannot be guaranteed

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