Two-channel radio frequency mems switch and manufacturing method thereof

Abstract

The invention provides a dual-channel radio-frequency MEMS (Micro Electro Mechanical System) switch and a manufacturing method thereof. The dual-channel radio-frequency MEMS switch comprises a base, a substrate and a movable micro mechanical structure, wherein the base is provided with a plurality of pins; the substrate is arranged on the base; and the movable micro mechanical structure is arranged on the substrate. The substrate is provided with two microwave transmission lines and anchor points; and the movable micro mechanical structure consists of folding beams, a straight beam, upper electrodes, connecting beams and contacts. According to the dual-channel radio-frequency MEMS switch and the manufacturing method thereof, a left pair of driving electrodes and a right pair of driving electrodes which are independent can be utilized for driving single movable micro mechanical structure to realize respective and independent control over the two microwave transmission lines, so as to form multiple transmission modes. Simultaneously, by three means such as disconnection and connection of the switch realized by utilizing the torsion of the folding beams, the control over the thicknesses of the folding beams and shortening for the gap between the driving electrodes, the driving voltage of the dual-channel radio-frequency MEMS switch is lower than 5V. In addition, according to monocrystalline silicon folding beams manufactured by adopting a bonding technology, the warping phenomenon generated by residual stress is eliminated and the rate of finished products is improved.

Description

technical field [0001] The invention relates to the field of radio frequency switches, in particular to a dual-channel multipurpose micro-electro-mechanical system (MEMS) switch and a manufacturing method thereof. Background technique [0002] RF microelectromechanical system (MEMS) switch is the most basic type of RF components using MEMS technology, and is usually used in wireless communication terminals, signal transmission and other systems. As the frequency used in communication technology is getting higher and higher, compared with traditional solid-state RF switches, RF MEMS switches have the advantages of larger linear response range, lower microwave loss and compatibility with IC technology. [0003] A typical RF MEMS switch has three main components: a micromechanical module, a driver module, and a microwave signal transmission module. Wherein, the micro-mechanical module can move in two different positions depending on the power provided by the driving module, wh...

AI Technical Summary

Problems solved by technology

However, the traditional RF MEMS has the following problems: First, the traditional RF MEMS switch can only use one or more micromechanical modules to control a microwave transmission line. If this type of switch needs to control two or more microwave signal transmission lines is achieved by means of a switch array

Second, among the above-mentioned switches, the driving voltage required by the switch driven by electrostatic force is very high, generally greater than 20V

Third, the above-mentioned switches generally use metal as the bridge film (movable micro-mechanical structure). Since the Young's modulus of metal is lower than that of silicon, and the thickness of the metal bridge film cannot be made very thick under the current process conditions, so that it can be The stiffness of the dynamic micromechanical structure is reduced, which increases the response time of the switch

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