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Full-automatic optical thickness gauge and refractive index/transmittance data processing method thereof

An optical thickness gauge and data processing technology, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problem that it is difficult to ensure the quality of coating, increase the work intensity of coating operators, and it is difficult to ensure the accuracy and precision of measurement and other issues to achieve the effect of eliminating interference, accurate judgment, and more content

Active Publication Date: 2013-08-07
中科唯实科技(德阳)有限公司
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Problems solved by technology

[0006] To sum up, the existing optical thickness gauges not only greatly increase the work intensity of coating operators, but also make it difficult to ensure the accuracy and precision of measurement, thus making it difficult to guarantee the quality of coating and other processes

Method used

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  • Full-automatic optical thickness gauge and refractive index/transmittance data processing method thereof
  • Full-automatic optical thickness gauge and refractive index/transmittance data processing method thereof
  • Full-automatic optical thickness gauge and refractive index/transmittance data processing method thereof

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Embodiment Construction

[0031] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0032] Such as figure 1 As shown, the fully automatic optical thickness gauge among the present invention comprises analog signal acquisition device, analog signal preprocessing circuit, A / D conversion circuit, central processing unit and anti-display LCD, the signal output end of analog signal acquisition device and analog signal The signal input end of the preprocessing circuit is connected, the signal output end of the analog signal preprocessing circuit is connected with the signal input end of the A / D conversion circuit, the signal output end of the A / D conversion circuit is connected with the refraction / transmittance data signal of the central processing unit The input end is connected, and the video signal output end of the central processing unit is connected with the signal input end of the reverse display LCD.

[0033] Such as figure 2 As shown, the analo...

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Abstract

The invention discloses a full-automatic optical thickness gauge. According to the full-automatic optical thickness gauge, a signal output end of an analog signal acquisition device is connected with a signal input end of an analog signal preprocessing circuit; a signal output end of the analog signal preprocessing circuit is connected with a signal input end of an analog / digital (A / D) conversioncircuit; a signal output end of the A / D conversion circuit is connected with a refractive index / transmittance data signal input end of a central processing unit (CPU); and a video signal output end of the CPU is connected with a signal input end of a display. The invention also discloses a refractive index / transmittance data processing method for the full-automatic optical thickness gauge. The method comprises the following steps of: inputting refractive index / transmittance data comprising a decimal place; performing median filtering; extracting a decimal place of an effective refractive index / transmittance; processing the decimal place; judging whether an extreme value exists or not; displaying a refractive index / transmittance value, a refractive index / transmittance trend line and the number of extreme values; and performing looping execution. The thickness is accurately measured by the full-automatic optical thickness gauge, and the full-automatic optical thickness gauge has precisedata and stable and reliable results.

Description

technical field [0001] The invention relates to an optical thickness gauge, in particular to an automatic optical thickness gauge and a refraction / transmittance data processing method thereof. Background technique [0002] The optical thickness gauge is an instrument that uses optical monitoring technology to detect the thickness of an object. Its front-end device is an analog signal acquisition device. ), the thickness value of the object is detected after data processing at the back end. [0003] Taking the vacuum coating system of optical parts as an example, the monitoring of film thickness is mainly divided into two types, the first is quartz crystal monitoring technology, and the second is optical monitoring technology. Among them, the cost of quartz crystal monitoring technology is relatively high, so the most common monitoring method is optical monitoring. [0004] The main method used in optical monitoring is the extreme value method. In short, when the thickness ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06
Inventor 许镜明张鹏张蜀晓严家荣陈启禄唐成
Owner 中科唯实科技(德阳)有限公司
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