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Planar maglev linear-motion platform

A linear motion, planar technology, applied in the direction of the workbench, manufacturing tools, etc., can solve the problem of limited planar motion travel, achieve the effect of large planar travel range, high dynamic response performance and motion accuracy, and avoid crawling

Inactive Publication Date: 2012-06-20
CENT SOUTH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the design of the traditional multi-dimensional maglev motion platform, the linear motor and the magnetic bearing are integrated together, the motion systems in the directions of each degree of freedom are strongly coupled to each other, and the planar motion stroke is limited

Method used

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  • Planar maglev linear-motion platform
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Embodiment Construction

[0010] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0011] see figure 1 , the planar maglev linear motion platform of the present invention, the main components include: a base (1), an electromagnet bracket (2) (supporting four pairs of vertical electromagnets), a maglev working platform (3), four sets of vertical Eddy current sensor (4), working load (5), four pairs of differential drive electromagnets (6), two sets of linear encoders for detecting motor displacement (7), positioning plate (8), drive bracket (9) , vertically place two linear motors (10) that move in the XY direction respectively, two pairs of parallel guide rails (11) that are consistent with the direction of motion of the motors, a photoelectric switch (12), and a limit block (13). Two pairs of rolling bearings (14) and two pairs of horizontal guiding electromagnets (15) are respectively arranged on each guiding direction. T...

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Abstract

The invention discloses a planar maglev linear-motion platform device with two-dimensional large stoke. Each electromagnetic bearing of the device consists of two differential driving electromagnets and is used for controlling current in coils to enable a maglev operation platform to suspend stably under the action of electromagnetic force and in no mechanical contact with a bearing block and a linear driving system. The platform and a linear motor driving unit are mutually independent, and two horizontally perpendicular linear motors drive the maglev platform in planar two-dimensional linear motion under the action of non-contact electromagnetic force of lateral guide suspended electromagnets. Two lateral linear guide and driving mechanisms of the maglev platform are completely identical in structure, and each guide mechanism consists of two electromagnetic bearings and mechanical rolling bearings. The two guide mechanisms are not in coupling relation, when the platform moves at high acceleration, the rigid rolling bearings assist in guiding and drive the maglev operation platform, and when the platform is in stable state and requires small driving force, the flexible electromagnetic bearings can directly drive the maglev operation platform.

Description

technical field [0001] The invention relates to a precision maglev linear motion control system in microelectronics manufacturing equipment, in particular to a large-stroke two-dimensional planar motion type maglev linear motion platform. technical background [0002] In some microelectronic chip manufacturing and biological manufacturing fields, such as high-speed wire bonding machines, manufacturing equipment requires high-speed, high-precision, and high-cleanliness motion systems. However, the motion system of current chip manufacturing equipment is supported by linear guide rails or air bearings. Due to the influence of mechanical friction or air flow, the positioning accuracy and dynamic performance are limited, and it is difficult to meet the requirements of high speed, high precision and environmental friendliness. It is a new choice to adopt the magnetic suspension support linear motion system without mechanical contact. In the design of the traditional multi-dimens...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25H1/00
Inventor 李群明韩雷邓华张世伟胥晓陈启会
Owner CENT SOUTH UNIV
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