Three-dimensional resonance trigger probe based on quartz tuning fork and three-dimensional resonance trigger positioning method

Abstract

The invention discloses a three-dimensional resonance trigger probe based on a quartz tuning fork and a three-dimensional resonance trigger location method. The three-dimensional resonance trigger probe is characterized in that the quartz tuning fork is used as a micro force sensor, a piezoelectric driver is fixed on a fork arm of the quartz tuning fork, a piezoelectric sensor is fixed on the other fork arm; the quartz tuning fork is vertical to the surface of a sample in the vibration direction on the Z direction and is parallel to the surface of the sample in the vibration direction on X and Y directions, an integrated micro measuring bar measurement ball is fixedly arranged on the fork arm close to one side where the sample is in, and a sine alternating-current signal output by a phase-locked loop is applied to the piezoelectric sensor as an excitation signal, and a fork resonance signal is detected by the piezoelectric sensor. When a micro three-dimensional external force causes that the resonance frequency of the probe changes, the resonance frequency of a quarts tuning fork probe changes, and three-dimensional resonance trigger location of the three-dimensional resonance trigger probe is realized through detecting the change of the resonance frequency of the quartz tuning fork.

Description

technical field [0001] The invention relates to a three-dimensional resonance trigger measuring head and a three-dimensional resonance trigger positioning method that can be applied in the field of three-dimensional shape measurement of various micromachines and MEMS devices. Background technique [0002] In recent years, the rapid development of microfabrication technology has made the orientation of products tend to be miniaturized, and various micromachines and MEMS devices have appeared. The geometric feature size of these micromachines is between tens of microns and several millimeters, and the dimensional accuracy is between tens of nanometers and hundreds of nanometers. Limited by the size of the measuring ball and the performance of the measuring head system, the traditional three-coordinate measuring machine cannot meet the precision measurement requirements of these devices. Although AFM and STM can be used to detect the surface morphology of micro-devices and micr...

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Problems solved by technology

However, due to the influence of surface characteristics such as color, luminosity, roughness, etc., it is still not possible to achieve the accuracy of the contact probe.

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