Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure

Abstract

The invention discloses a single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with a coupled beam structure. The single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer comprises a base, a fixed supporter, an inertial mass block and comb capacitor structures, wherein the inertial mass block is of a rectangle structure and is suspended above the middle part of the base; the comb capacitor structures are respectively arranged at four sides of the inertial mass block; the four comb capacitor structures are symmetrically distributed relative to the inertial mass block; movable comb teeth on the left side and the right side of the inertial mass block and the fixed comb teeth at the corresponding sides form capacitors Cx1 and Cx2; and the movable comb teeth at the rear side and the front side of the inertial mass block and the fixed comb teeth at the corresponding sides form capacitors Cy1 and Cy2. The transducer is of a symmetric micro-structure, ensures the consistent sensitivity in two detection directions and is connected with the inertial mass block and tooth axles of the comb capacitor structures through the coupled beam.Crosstalk interference can be effectively restrained when the single sensitive mass element is sensitive to accelerations in two directions X and Y and differential capacitance detection is finished.

Description

technical field [0001] The invention belongs to the technical field of MEMS sensors, in particular to a single sensitive mass element silicon micro two-dimensional acceleration sensor with a coupling beam structure. [0002] Background technique [0003] At present, the technology of uniaxial miniature acceleration sensor is relatively mature. However, in some special applications, such as aircraft attitude control, missile guidance, battlefield robots, etc., it is often necessary to detect acceleration in two directions. If only the early combination method is used, that is, two uniaxial miniature acceleration sensors are assembled orthogonally to each other, not only the performance of the sensor is greatly affected by the assembly accuracy, but also there are problems such as low integration, large volume, and poor consistency. Therefore, the two-dimensional integrated micro-acceleration sensor has become a research hotspot. [0004] The existing two-dimensional integr...

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Problems solved by technology

[0004] The existing two-dimensional integrated micro-acceleration sensors, whether two independent acceleration sensors are fabricated on the sam

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