Manufacturing method of electroluminescence test electrode

A technology for testing electrodes and manufacturing methods, which is applied to measuring devices, measuring electrical variables, and manufacturing measuring instruments, etc., can solve the problems of poor test repeatability, difference, and poor optical power test repeatability, and achieve improved repeatability, convenient use and reliability. The effect of stabilizing photoelectric test results
CN102520221AInactive Publication Date: 2012-06-27ADVANCED OPTRONIC DEVICES CHINA

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ADVANCED OPTRONIC DEVICES CHINA
Publication Date
2012-06-27
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a manufacturing method of an electroluminescence test electrode. The method comprises the following steps: selecting indium granular with a same size; using a fixed pressure to carry out constant force pressing indium granular on an epitaxial wafer; repeatedly carrying out heating, cooling, the constant force pressing to the indium granular so that a resistance between the indium granular and the epitaxial wafer can reach stability. The invention has the following advantages that: the manufacturing method is simple; usage is convenient; through repeatedly carrying out the heating, the cooling, the constant force pressing to the indium granular, repeatability of the test can be substantially increased and a repeatability standard deviation can be controlled in 0-4% so that a reliable and stable photoelectric test result can be obtained.
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Description

technical field

[0001] The invention relates to a method for manufacturing an electrode, in particular to a method for manufacturing an electroluminescence test electrode, which belongs to the field of LED test electrodes. Background technique

[0002] After the epitaxial wafer is grown, it is necessary to quickly and accurately measure its photoelectric parameters with an electroluminescence tester, and then adjust various parameters of the epitaxial growth program according to the measurement results, so as to achieve the purpose of continuously optimizing the epitaxial structure.

[0003] The current electrode production scheme includes the following steps: â‘ select indium grains of uniform size; â‘¡press the indium grains on the epitaxial wafer; â‘¢heat to reduce the contact resistance between the indium grains and the epitaxial wafer; â‘£test with an electroluminescence tester.

[0004] Disadvantages of the existing technology: Before each measurement using the electroluminesc...

Claims

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